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Journal: Micromachines, 2024
Volume: 15
Number: 110

Article: Investigation of Gallium Arsenide Deformation Anisotropy during Nanopolishing via Molecular Dynamics Simulation
Authors: by Bo Zhao, Xifeng Gao, Jiansheng Pan, Huan Liu and Pengyue Zhao
Link: https://www.mdpi.com/2072-666X/15/1/110

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