Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Influence of the Burst Duration
3.2. Influence of the Burst Shape
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Sodalime | Fused Silica | |||||
---|---|---|---|---|---|---|
Burst | Rate 1 (µm/Burst) | Rate 2 (µm/Burst) | Maximum Depth (µm) | Rate 1 (µm/Burst) | Rate 2 (µm/Burst) | Maximum Depth (µm) |
36 ppb | 0.65 | 0.11 | 950 | 0.23 | 0.11 | 1000 |
70 ppb | 0.7 | 0.12 | 1000 | 0.48 | 0.10 | 800 |
100 ppb | 0.9 | 0.16 | 820 | 0.6 | 0.12 | 600 |
130 ppb | 1.2 | 0.28 | 690 | 0.78 | 0.27 | 420 |
160 ppb | 1.3 | 0.35 | 550 | / | / | / |
50 ppb Flat | 0.5 | 0.12 | 1190 | 0.3 | 0.12 | 1180 |
Laser Parameters | Rate 1 (µm/Burst) | Rate 2 (µm/Burst) | Maximal Depth (µm) |
---|---|---|---|
100 ppb decreasing | 1.2 | 0.45 | 614 |
100 ppb increasing | 0.6 | 0.25 | 717 |
100 ppb flat | 0.6 | 0.16 | 834 |
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Balage, P.; Bonamis, G.; Lafargue, M.; Guilberteau, T.; Delaigue, M.; Hönninger, C.; Qiao, J.; Lopez, J.; Manek-Hönninger, I. Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration. Micromachines 2023, 14, 1158. https://doi.org/10.3390/mi14061158
Balage P, Bonamis G, Lafargue M, Guilberteau T, Delaigue M, Hönninger C, Qiao J, Lopez J, Manek-Hönninger I. Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration. Micromachines. 2023; 14(6):1158. https://doi.org/10.3390/mi14061158
Chicago/Turabian StyleBalage, Pierre, Guillaume Bonamis, Manon Lafargue, Théo Guilberteau, Martin Delaigue, Clemens Hönninger, Jie Qiao, John Lopez, and Inka Manek-Hönninger. 2023. "Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration" Micromachines 14, no. 6: 1158. https://doi.org/10.3390/mi14061158