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Journal: Micromachines, 2023
Volume: 14
Number: 1988
Article:
Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams
Authors:
by
Huiyi Zhang, Xiaojun Qiao, Huifen Wei, Xiaohuang Li, Xiaohui Wu, Nanxin Yu, Hao Lu, Tao Guo, Xiujian Chou and Wenping Geng
Link:
https://www.mdpi.com/2072-666X/14/11/1988
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