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Journal: Micromachines, 2023
Volume: 14
Number: 1988
1988
Article: Electric-Force Conversion Performance of Si-Based LiNbO₃ Devices Based on Four Cantilever Beams
Authors: by Huiyi Zhang, Xiaojun Qiao, Huifen Wei, Xiaohuang Li, Xiaohui Wu, Nanxin Yu, Hao Lu, Tao Guo, Xiujian Chou and Wenping Geng
Link: https://www.mdpi.com/2072-666X/14/11/1988

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