Xu, Z.; Yan, J.; Ji, M.; Zhou, Y.; Wang, D.; Wang, Y.; Mai, Z.; Zhao, X.; Nan, T.; Xing, G.;
et al. An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance. Micromachines 2022, 13, 2250.
https://doi.org/10.3390/mi13122250
AMA Style
Xu Z, Yan J, Ji M, Zhou Y, Wang D, Wang Y, Mai Z, Zhao X, Nan T, Xing G,
et al. An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance. Micromachines. 2022; 13(12):2250.
https://doi.org/10.3390/mi13122250
Chicago/Turabian Style
Xu, Zebin, Jiahui Yan, Meilin Ji, Yongxin Zhou, Dandan Wang, Yuanzhi Wang, Zhihong Mai, Xuefeng Zhao, Tianxiang Nan, Guozhong Xing,
and et al. 2022. "An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance" Micromachines 13, no. 12: 2250.
https://doi.org/10.3390/mi13122250
APA Style
Xu, Z., Yan, J., Ji, M., Zhou, Y., Wang, D., Wang, Y., Mai, Z., Zhao, X., Nan, T., Xing, G., & Zhang, S.
(2022). An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance. Micromachines, 13(12), 2250.
https://doi.org/10.3390/mi13122250