Article Versions Notes

Nian L, Zou Y, Gao C, Zhou Y, Fan Y, Wang J, Liu W, Liu Y, Soon JB, Cai Y, et al. Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible $K_{eff}^2$. Micromachines. 2022; 13(12):2044. https://doi.org/10.3390/mi13122044

Nian, Laixia, Yang Zou, Chao Gao, Yu Zhou, Yuchen Fan, Jian Wang, Wenjuan Liu, Yan Liu, Jeffrey Bowoon Soon, Yao Cai, and et al. 2022. "Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible $K_{eff}^2$" Micromachines 13, no. 12: 2044. https://doi.org/10.3390/mi13122044

Nian, L., Zou, Y., Gao, C., Zhou, Y., Fan, Y., Wang, J., Liu, W., Liu, Y., Soon, J. B., Cai, Y., & Sun, C. (2022). Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible $K_{eff}^2$. Micromachines, 13(12), 2044. https://doi.org/10.3390/mi13122044