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Journal: Micromachines, 2022
Volume: 13
Number: 63
Article:
A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer
Authors:
by
Jun Wu, Hideyuki Maekoba, Arnaud Parent and Tamio Ikehashi
Link:
https://www.mdpi.com/2072-666X/13/1/63
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