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Micromachines, Volume 12, Issue 6

June 2021 - 142 articles

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Cover Story: Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components and exquisite gravimetric sensitivities have significantly advanced bio/chemical sensor technologies in the past two decades. Great effort has been made to tackle the challenges of operating resonant mass sensors in viscous media, and, as such, rapid detection of various trace analytes in gas and liquid phases, such as hazardous chemical vapors, pollutant gases, and biological species, has been achieved, which impacts public security, food safety, environmental monitoring, and human healthcare. View this paper

Articles (142)

  • Article
  • Open Access
6 Citations
3,004 Views
22 Pages

21 June 2021

The paper presents a numerical and experimental investigation of a novel two degrees of freedom (2-DOF) piezoelectric actuator that can generate rotary motion of the sphere-shaped rotor as well as induce planar motion of the flat stage. The actuator...

  • Article
  • Open Access
12 Citations
3,986 Views
20 Pages

Microrheometer for Biofluidic Analysis: Electronic Detection of the Fluid-Front Advancement

  • Lourdes Méndez-Mora,
  • Maria Cabello-Fusarés,
  • Josep Ferré-Torres,
  • Carla Riera-Llobet,
  • Samantha Lopez,
  • Claudia Trejo-Soto,
  • Tomas Alarcón and
  • Aurora Hernandez-Machado

20 June 2021

The motivation for this study was to develop a microdevice for the precise rheological characterization of biofluids, especially blood. The method presented was based on the principles of rheometry and fluid mechanics at the microscale. Traditional r...

  • Article
  • Open Access
7 Citations
4,151 Views
9 Pages

Microfluidics Integration into Low-Noise Multi-Electrode Arrays

  • Mafalda Ribeiro,
  • Pamela Ali,
  • Benjamin Metcalfe,
  • Despina Moschou and
  • Paulo R. F. Rocha

20 June 2021

Organ-on-Chip technology is commonly used as a tool to replace animal testing in drug development. Cells or tissues are cultured on a microchip to replicate organ-level functions, where measurements of the electrical activity can be taken to understa...

  • Article
  • Open Access
7 Citations
3,431 Views
8 Pages

19 June 2021

In this paper, stretchable strain sensors with a controllable negative resistance sensitivity coefficient are firstly proposed. In order to realize the sensor with a negative resistance sensitivity coefficient, a stretchable stress sensor with sandwi...

  • Review
  • Open Access
24 Citations
4,187 Views
27 Pages

Gold–Carbon Nanocomposites for Environmental Contaminant Sensing

  • Shahrooz Rahmati,
  • William Doherty,
  • Arman Amani Babadi,
  • Muhamad Syamim Akmal Che Mansor,
  • Nurhidayatullaili Muhd Julkapli,
  • Volker Hessel and
  • Kostya (Ken) Ostrikov

19 June 2021

The environmental crisis, due to the rapid growth of the world population and globalisation, is a serious concern of this century. Nanoscience and nanotechnology play an important role in addressing a wide range of environmental issues with innovativ...

  • Article
  • Open Access
11 Citations
4,104 Views
9 Pages

19 June 2021

Recently, methods for the treatment of chronic diseases and disorders through the modulation of peripheral and autonomic nerves have been proposed. To investigate various treatment methods and results, experiments are being conducted on animals such...

  • Article
  • Open Access
4 Citations
3,968 Views
11 Pages

Double-Quantum-Well AlGaN/GaN Field Effect Transistors with Top and Back Gates: Electrical and Noise Characteristics

  • Maksym Dub,
  • Pavlo Sai,
  • Maciej Sakowicz,
  • Lukasz Janicki,
  • Dmytro B. But,
  • Paweł Prystawko,
  • Grzegorz Cywiński,
  • Wojciech Knap and
  • Sergey Rumyantsev

19 June 2021

AlGaN/GaN fin-shaped and large-area grating gate transistors with two layers of two-dimensional electron gas and a back gate were fabricated and studied experimentally. The back gate allowed reducing the subthreshold leakage current, improving the su...

  • Article
  • Open Access
2 Citations
2,587 Views
8 Pages

Amplitude Control Method of Magnetic Flux Vertical Modulation Structure for TMR Magnetic Sensor Based on Harmonic Component of Modulated Signal

  • Junsheng Zhang,
  • Mengchun Pan,
  • Qingfa Du,
  • Jiafei Hu,
  • Kun Sun,
  • Yang Yu,
  • Xinmiao Zhang and
  • Huihui Luo

19 June 2021

Magnetic flux vertical modulation method based on piezoelectric resonance can reduce the 1/f noise of tunnel magnetoresistance (TMR) magnetic sensor and significantly improves the low-frequency magnetic field detectivity. However, the amplitude varia...

  • Article
  • Open Access
12 Citations
5,411 Views
13 Pages

19 June 2021

In this work, we used a co-flow microfluidic device with an injection and a collection tube to generate droplets with different layers due to phase separation. The phase separation system consisted of poly(ethylene glycol) diacrylate 700 (PEGDA 700),...

  • Review
  • Open Access
65 Citations
14,181 Views
29 Pages

The Recent Progress of MEMS/NEMS Resonators

  • Lei Wei,
  • Xuebao Kuai,
  • Yidi Bao,
  • Jiangtao Wei,
  • Liangliang Yang,
  • Peishuai Song,
  • Mingliang Zhang,
  • Fuhua Yang and
  • Xiaodong Wang

19 June 2021

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, an...

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Micromachines - ISSN 2072-666XCreative Common CC BY license