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Micromachines, Volume 12, Issue 6

2021 June - 142 articles

Cover Story: Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components and exquisite gravimetric sensitivities have significantly advanced bio/chemical sensor technologies in the past two decades. Great effort has been made to tackle the challenges of operating resonant mass sensors in viscous media, and, as such, rapid detection of various trace analytes in gas and liquid phases, such as hazardous chemical vapors, pollutant gases, and biological species, has been achieved, which impacts public security, food safety, environmental monitoring, and human healthcare. View this paper
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Articles (142)

  • Article
  • Open Access
7 Citations
3,215 Views
22 Pages

21 June 2021

The paper presents a numerical and experimental investigation of a novel two degrees of freedom (2-DOF) piezoelectric actuator that can generate rotary motion of the sphere-shaped rotor as well as induce planar motion of the flat stage. The actuator...

  • Article
  • Open Access
8 Citations
4,469 Views
9 Pages

Microfluidics Integration into Low-Noise Multi-Electrode Arrays

  • Mafalda Ribeiro,
  • Pamela Ali,
  • Benjamin Metcalfe,
  • Despina Moschou and
  • Paulo R. F. Rocha

20 June 2021

Organ-on-Chip technology is commonly used as a tool to replace animal testing in drug development. Cells or tissues are cultured on a microchip to replicate organ-level functions, where measurements of the electrical activity can be taken to understa...

  • Article
  • Open Access
14 Citations
4,192 Views
20 Pages

Microrheometer for Biofluidic Analysis: Electronic Detection of the Fluid-Front Advancement

  • Lourdes Méndez-Mora,
  • Maria Cabello-Fusarés,
  • Josep Ferré-Torres,
  • Carla Riera-Llobet,
  • Samantha Lopez,
  • Claudia Trejo-Soto,
  • Tomas Alarcón and
  • Aurora Hernandez-Machado

20 June 2021

The motivation for this study was to develop a microdevice for the precise rheological characterization of biofluids, especially blood. The method presented was based on the principles of rheometry and fluid mechanics at the microscale. Traditional r...

  • Article
  • Open Access
7 Citations
3,735 Views
8 Pages

19 June 2021

In this paper, stretchable strain sensors with a controllable negative resistance sensitivity coefficient are firstly proposed. In order to realize the sensor with a negative resistance sensitivity coefficient, a stretchable stress sensor with sandwi...

  • Review
  • Open Access
26 Citations
4,591 Views
27 Pages

Gold–Carbon Nanocomposites for Environmental Contaminant Sensing

  • Shahrooz Rahmati,
  • William Doherty,
  • Arman Amani Babadi,
  • Muhamad Syamim Akmal Che Mansor,
  • Nurhidayatullaili Muhd Julkapli,
  • Volker Hessel and
  • Kostya (Ken) Ostrikov

19 June 2021

The environmental crisis, due to the rapid growth of the world population and globalisation, is a serious concern of this century. Nanoscience and nanotechnology play an important role in addressing a wide range of environmental issues with innovativ...

  • Article
  • Open Access
12 Citations
4,443 Views
9 Pages

19 June 2021

Recently, methods for the treatment of chronic diseases and disorders through the modulation of peripheral and autonomic nerves have been proposed. To investigate various treatment methods and results, experiments are being conducted on animals such...

  • Article
  • Open Access
5 Citations
4,336 Views
11 Pages

Double-Quantum-Well AlGaN/GaN Field Effect Transistors with Top and Back Gates: Electrical and Noise Characteristics

  • Maksym Dub,
  • Pavlo Sai,
  • Maciej Sakowicz,
  • Lukasz Janicki,
  • Dmytro B. But,
  • Paweł Prystawko,
  • Grzegorz Cywiński,
  • Wojciech Knap and
  • Sergey Rumyantsev

19 June 2021

AlGaN/GaN fin-shaped and large-area grating gate transistors with two layers of two-dimensional electron gas and a back gate were fabricated and studied experimentally. The back gate allowed reducing the subthreshold leakage current, improving the su...

  • Article
  • Open Access
3 Citations
2,764 Views
8 Pages

Amplitude Control Method of Magnetic Flux Vertical Modulation Structure for TMR Magnetic Sensor Based on Harmonic Component of Modulated Signal

  • Junsheng Zhang,
  • Mengchun Pan,
  • Qingfa Du,
  • Jiafei Hu,
  • Kun Sun,
  • Yang Yu,
  • Xinmiao Zhang and
  • Huihui Luo

19 June 2021

Magnetic flux vertical modulation method based on piezoelectric resonance can reduce the 1/f noise of tunnel magnetoresistance (TMR) magnetic sensor and significantly improves the low-frequency magnetic field detectivity. However, the amplitude varia...

  • Article
  • Open Access
13 Citations
6,032 Views
13 Pages

19 June 2021

In this work, we used a co-flow microfluidic device with an injection and a collection tube to generate droplets with different layers due to phase separation. The phase separation system consisted of poly(ethylene glycol) diacrylate 700 (PEGDA 700),...

  • Review
  • Open Access
71 Citations
15,799 Views
29 Pages

The Recent Progress of MEMS/NEMS Resonators

  • Lei Wei,
  • Xuebao Kuai,
  • Yidi Bao,
  • Jiangtao Wei,
  • Liangliang Yang,
  • Peishuai Song,
  • Mingliang Zhang,
  • Fuhua Yang and
  • Xiaodong Wang

19 June 2021

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, an...

  • Article
  • Open Access
9 Citations
4,246 Views
10 Pages

Implantable Optrode Array for Optogenetic Modulation and Electrical Neural Recording

  • Saeyeong Jeon,
  • Youjin Lee,
  • Daeho Ryu,
  • Yoon Kyung Cho,
  • Yena Lee,
  • Sang Beom Jun and
  • Chang-Hyeon Ji

19 June 2021

During the last decade, optogenetics has become an essential tool for neuroscience research due to its unrivaled feature of cell-type-specific neuromodulation. There have been several technological advances in light delivery devices. Among them, the...

  • Article
  • Open Access
12 Citations
3,189 Views
12 Pages

18 June 2021

It is urgent that a convenient and sensitive technique of detecting Hg2+ be developed because of its toxicity. Conventional fluorescence analysis works with a single fluorescence probe, and it often suffers from signal fluctuations which are influenc...

  • Review
  • Open Access
13 Citations
4,740 Views
14 Pages

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

  • JiuJiang Wang,
  • Xin Liu,
  • YuanYu Yu,
  • Yao Li,
  • ChingHsiang Cheng,
  • Shuang Zhang,
  • PengUn Mak,
  • MangI Vai and
  • SioHang Pun

18 June 2021

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. Th...

  • Article
  • Open Access
2 Citations
2,912 Views
18 Pages

Experimental Validation of a Novel Generator of Gas Mixtures Based on Axial Gas Pulses Coupled to a Micromixer

  • Florian Noël,
  • Claire Trocquet,
  • Christophe A. Serra and
  • Stéphane Le Calvé

18 June 2021

In this work, a novel generator of gas mixtures previously numerically investigated and based on axial gas pulses coupled to a micromixer has been conceived, manufactured, and validated. Standard gaseous pollutant mixtures and pure nitrogen or pure a...

  • Article
  • Open Access
6 Citations
3,152 Views
14 Pages

18 June 2021

A direct drive servovalve has some inherent benefits over its conventional counterparts, but also has better reliability and output power. However, due to the rigid connection between the spool and the motor, which takes the place of interstage drive...

  • Article
  • Open Access
8 Citations
5,883 Views
17 Pages

18 June 2021

This paper presents an integrated navigation system that can function more efficiently than an inertial navigation system (INS), the results of which are not precise enough because of drifts caused by accelerometers. The paper’s proposed approach dep...

  • Article
  • Open Access
38 Citations
8,367 Views
15 Pages

Medical Applications of Diode Lasers: Pulsed versus Continuous Wave (cw) Regime

  • Michał Michalik,
  • Jacek Szymańczyk,
  • Michał Stajnke,
  • Tomasz Ochrymiuk and
  • Adam Cenian

17 June 2021

The paper deals with the medical application of diode-lasers. A short review of medical therapies is presented, taking into account the wavelength applied, continuous wave (cw) or pulsed regimes, and their therapeutic effects. Special attention was p...

  • Article
  • Open Access
9 Citations
3,072 Views
26 Pages

17 June 2021

In micro-electrical discharge machining (micro-EDM) milling, the cross-section of the microgroove machine is frequently not an ideal rectangle. For instance, there are arc shapes on the bottom and corners, and the sidewall is not steep. The theoretic...

  • Article
  • Open Access
2 Citations
2,722 Views
17 Pages

Experimental Study of the Deposition of Magnetic Particles on the Walls of Microchannels

  • Sylvana Varela,
  • Antonio Rivas,
  • Anton Vernet and
  • Jordi Pallarès

17 June 2021

This study analyzes experimentally the deposition of magnetic beads on the walls of a square microchannel by the action of a nearby cubical magnet. The deposition has been studied for different magnetic bead sizes, flow rates, magnetic conditions and...

  • Article
  • Open Access
37 Citations
6,098 Views
11 Pages

16 June 2021

Recently, triply periodic minimal surface (TPMS) lattice structures have been increasingly employed in many applications, such as lightweighting and heat transfer, and they are enabled by the maturation of additive manufacturing technology, i.e., las...

  • Article
  • Open Access
18 Citations
4,560 Views
14 Pages

A Gravity-Triggered Liquid Metal Patch Antenna with Reconfigurable Frequency

  • Peng Qin,
  • Guan-Long Huang,
  • Jia-Jun Liang,
  • Qian-Yu Wang,
  • Jun-Heng Fu,
  • Xi-Yu Zhu,
  • Tian-Ying Liu,
  • Lin Gui,
  • Jing Liu and
  • Zhong-Shan Deng

16 June 2021

In this paper, a gravity-triggered liquid metal microstrip patch antenna with reconfigurable frequency is proposed with experimental verification. In this work, the substrate of the antenna is quickly obtained through three-dimensional (3D) printing...

  • Article
  • Open Access
14 Citations
3,874 Views
27 Pages

Spark Analysis Based on the CNN-GRU Model for WEDM Process

  • Changhong Liu,
  • Xingxin Yang,
  • Shaohu Peng,
  • Yongjun Zhang,
  • Lingxi Peng and
  • Ray Y. Zhong

16 June 2021

Wire electrical discharge machining (WEDM), widely used to fabricate micro and precision parts in manufacturing industry, is a nontraditional machining method using discharge energy which is transformed into thermal energy to efficiently remove mater...

  • Review
  • Open Access
43 Citations
8,445 Views
24 Pages

A Brief Review on Additive Manufacturing of Polymeric Composites and Nanocomposites

  • Vahid Monfared,
  • Hamid Reza Bakhsheshi-Rad,
  • Seeram Ramakrishna,
  • Mahmood Razzaghi and
  • Filippo Berto

16 June 2021

In this research article, a mini-review study is performed on the additive manufacturing (AM) of the polymeric matrix composites (PMCs) and nanocomposites. In this regard, some methods for manufacturing and important and applied results are briefly i...

  • Feature Paper
  • Article
  • Open Access
1 Citations
2,690 Views
19 Pages

Geometric Methods for Efficient Planar Swimming of Copepod Nauplii

  • Corey Shanbrom,
  • Jonas Balisacan,
  • George Wilkens and
  • Monique Chyba

16 June 2021

Copepod nauplii are larval crustaceans with important ecological functions. Due to their small size, they experience an environment of low Reynolds number within their aquatic habitat. Here we provide a mathematical model of a swimming copepod naupli...

  • Article
  • Open Access
15 Citations
3,337 Views
12 Pages

Scratch Behaviour of Bulk Silicon Nitride Ceramics

  • Xiaolan Xiao,
  • Jiayun Deng,
  • Qiang Xiong,
  • Qiusheng Yan,
  • Zhengtao Wu and
  • Huatay Lin

16 June 2021

Si3N4 ceramic is generally recognized as being difficult to machine due to its hardness and brittleness. It is necessary to control the normal load applied and the machined depth of the abrasive particles in order to eliminate surface/subsurface dama...

  • Article
  • Open Access
12 Citations
4,011 Views
23 Pages

Design and Analysis of a Radio-Frequency Moisture Sensor for Grain Based on the Difference Method

  • Zhongxu Chen,
  • Wenfu Wu,
  • Jianpeng Dou,
  • Zhe Liu,
  • Kai Chen and
  • Yan Xu

16 June 2021

Grain moisture is one of the key indexes of grain quality, and acquiring an accurate moisture value is critical for grain storage security. However, the sensors used in the traditional methods for testing grain moisture are based on capacitance, micr...

  • Review
  • Open Access
12 Citations
7,212 Views
14 Pages

Random Telegraph Noise in 3D NAND Flash Memories

  • Alessandro S. Spinelli,
  • Gerardo Malavena,
  • Andrea L. Lacaita and
  • Christian Monzio Compagnoni

16 June 2021

In this paper, we review the phenomenology of random telegraph noise (RTN) in 3D NAND Flash arrays. The main features of such arrays resulting from their mainstream integration scheme are first discussed, pointing out the relevant role played by the...

  • Article
  • Open Access
20 Citations
4,002 Views
8 Pages

16 June 2021

The intentional doping of lateral GaN power high electron mobility transistors (HEMTs) with carbon (C) impurities is a common technique to reduce buffer conductivity and increase breakdown voltage. Due to the introduction of trap levels in the GaN ba...

  • Article
  • Open Access
2 Citations
2,718 Views
16 Pages

15 June 2021

Based on the scanning grating mirror developed by us, this paper presents a method for precise control of the scanning grating mirror and high-speed spectrum data acquisition. In addition, a system circuit of the scanning grating mirror control and a...

  • Review
  • Open Access
30 Citations
7,859 Views
19 Pages

15 June 2021

Respiratory viral infections threaten human life and inflict an enormous healthcare burden worldwide. Frequent monitoring of viral antibodies and viral load can effectively help to control the spread of the virus and make timely interventions. Howeve...

  • Review
  • Open Access
49 Citations
6,627 Views
20 Pages

15 June 2021

With the rapid progress of artificial intelligence, humans are moving toward the era of the intelligent connection of all things. Therefore, the demand for sensors is drastically increasing with developing intelligent social applications. Traditional...

  • Article
  • Open Access
10 Citations
3,549 Views
13 Pages

MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

  • Wenjie Qi,
  • Chao Xu,
  • Bowen Liu,
  • Xu She,
  • Tian Liang,
  • Deyong Chen,
  • Junbo Wang and
  • Jian Chen

15 June 2021

This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon–glass–silicon bonded wafer. By integrating four electrodes on one silicon–glass–silicon bonded wafer, the consistency of the develope...

  • Article
  • Open Access
10 Citations
4,036 Views
23 Pages

15 June 2021

Fluidic larger-scale integration (LSI) resides at the heart of comprehensive sample-to-answer automation and parallelization of assay panels for frequent and ubiquitous bioanalytical testing in decentralized point-of-use/point-of-care settings. This...

  • Review
  • Open Access
108 Citations
16,112 Views
30 Pages

14 June 2021

Recently, owing to their excellent flexibility and adaptability, skin-like pressure and strain sensors integrated with the human body have the potential for great prospects in healthcare. This review mainly focuses on the representative advances of t...

  • Article
  • Open Access
2 Citations
2,677 Views
8 Pages

14 June 2021

We studied the effects of the lattice pitch of indium-doped tin oxide (ITO) periodic nanostructures on the diffracted transmission to improve the light extraction efficiency of light-emitting diodes (LEDs). Periodic hexagonal ITO nanopillars with lat...

  • Article
  • Open Access
20 Citations
4,507 Views
11 Pages

Pre-Degassed Microfluidic Chamber-Based Digital PCR Device for Meat Authentication Applications

  • Hezhi Hu,
  • Jingmeng Cheng,
  • Chunyang Wei,
  • Shanshan Li,
  • Chengzhuang Yu,
  • Xiaoshuai Meng and
  • Junwei Li

14 June 2021

Droplet digital polymerase chain reaction (ddPCR) suffers from the need for specific equipment and skilled personnel; thus, we here present a chamber-based digital PCR microfluidic device that is compatible with fluorescence image read-out systems an...

  • Article
  • Open Access
6 Citations
2,871 Views
19 Pages

13 June 2021

In this paper, a high step-up boost converter with a non-isolated configuration is proposed. This configuration has a quadratic voltage gain, suitable for processing energy from alternative sources. It consists of two boost converters, including a tr...

  • Article
  • Open Access
2 Citations
2,747 Views
13 Pages

13 June 2021

We performed a comparative study on the Gaussian noise and memristance variation tolerance of three crossbar architectures, namely the complementary crossbar architecture, the twin crossbar architecture, and the single crossbar architecture, for neur...

  • Article
  • Open Access
5 Citations
4,495 Views
11 Pages

13 June 2021

The small intestine has the majority of a host’s immune cells, and it controls immune responses. Immune responses are induced by a gut bacteria sampling process in the small intestine. The mechanism of immune responses in the small intestine is studi...

  • Article
  • Open Access
19 Citations
3,983 Views
15 Pages

Toward Development of a Label-Free Detection Technique for Microfluidic Fluorometric Peptide-Based Biosensor Systems

  • Nikita Sitkov,
  • Tatiana Zimina,
  • Alexander Kolobov,
  • Vladimir Karasev,
  • Alexander Romanov,
  • Viktor Luchinin and
  • Dmitry Kaplun

13 June 2021

The problems of chronic or noncommunicable diseases (NCD) that now kill around 40 million people each year require multiparametric combinatorial diagnostics for the selection of effective treatment tactics. This could be implemented using the biosens...

  • Article
  • Open Access
12 Citations
3,777 Views
13 Pages

Elimination of Hole Mouth Burr in Multilayer PCB Micro-Hole by Using Micro-EDM

  • Xinke Feng,
  • Bin Xu,
  • Jianguo Lei,
  • Xiaoyu Wu,
  • Feng Luo and
  • Lianyu Fu

12 June 2021

The micro-hole is a key structure in multilayer printed circuit board (PCB), as it enables the effective transmission of electrical signals. At present, the most common way to machine PCB micro-holes is mechanical drilling using micro-bit. However, i...

  • Article
  • Open Access
5 Citations
3,466 Views
12 Pages

A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

  • Tian Zhang,
  • Wendong Zhang,
  • Xingling Shao,
  • Yuhua Yang,
  • Zhihao Wang,
  • Yang Wu and
  • Yu Pei

11 June 2021

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to red...

  • Article
  • Open Access
18 Citations
4,528 Views
12 Pages

11 June 2021

In this paper, a flexible micro-operation platform with three degrees of freedom, large stroke, and high precision is designed to meet the higher demands in the fields of biological engineering and medicine. The platform adopts a compound lever mecha...

  • Review
  • Open Access
96 Citations
11,412 Views
18 Pages

Transendothelial Electrical Resistance Measurement across the Blood–Brain Barrier: A Critical Review of Methods

  • Judit P. Vigh,
  • András Kincses,
  • Burak Ozgür,
  • Fruzsina R. Walter,
  • Ana Raquel Santa-Maria,
  • Sándor Valkai,
  • Mónika Vastag,
  • Winfried Neuhaus,
  • Birger Brodin and
  • Mária A. Deli
  • + 1 author

11 June 2021

The blood–brain barrier (BBB) represents the tightest endothelial barrier within the cardiovascular system characterized by very low ionic permeability. Our aim was to describe the setups, electrodes, and instruments to measure electrical resistance...

  • Article
  • Open Access
2,691 Views
9 Pages

10 June 2021

Recently, a new method [P. Partovi-Azar and D. Sebastiani, J. Chem. Phys. 152, 064101 (2020)] was proposed to increase the efficiency of proton transfer energy calculations in density functional theory by using the T1 state with additional optimized...

  • Article
  • Open Access
13 Citations
3,535 Views
15 Pages

10 June 2021

Dynamic modeling and frequency characteristic analysis of a novel 3-PSS (three-prismatic-spherical-spherical) flexible parallel micro-manipulator with three translational DOF in space were investigated in this paper. Firstly, the kinematics analysis...

  • Article
  • Open Access
16 Citations
6,843 Views
21 Pages

Simulation and Modeling of Novel Electronic Device Architectures with NESS (Nano-Electronic Simulation Software): A Modular Nano TCAD Simulation Framework

  • Cristina Medina-Bailon,
  • Tapas Dutta,
  • Ali Rezaei,
  • Daniel Nagy,
  • Fikru Adamu-Lema,
  • Vihar P. Georgiev and
  • Asen Asenov

10 June 2021

The modeling of nano-electronic devices is a cost-effective approach for optimizing the semiconductor device performance and for guiding the fabrication technology. In this paper, we present the capabilities of the new flexible multi-scale nano TCAD...

  • Article
  • Open Access
20 Citations
6,846 Views
14 Pages

A Novel SimpleDrop Chip for 3D Spheroid Formation and Anti-Cancer Drug Assay

  • Xiaoli Liu,
  • Huichao Lin,
  • Jiaao Song,
  • Taiyi Zhang,
  • Xiaoying Wang,
  • Xiaowen Huang and
  • Chengyun Zheng

10 June 2021

Cell culture is important for the rapid screening of anti-cancer drug candidates, attracting intense interest. Traditional 2D cell culture has been widely utilized in cancer biological research. However, 3D cellular spheroids are able to recapitulate...

  • Article
  • Open Access
4 Citations
3,517 Views
12 Pages

Synthesis, Characterization, and Applications of Silver Nano Fibers in Humidity, Ammonia, and Temperature Sensing

  • Haroon-Ur Rashid,
  • Muhammad Ali,
  • Mahidur R. Sarker,
  • Sawal Hamid Md Ali,
  • Naseem Akhtar,
  • Nadir Ali Khan,
  • Muhammad Asif and
  • Sahar Shah

10 June 2021

The promising chemical, mechanical, and electrical properties of silver from nano scale to bulk level make it useful to be used in a variety of applications in the biomedical and electronic fields. Recently, several methods have been proposed and app...

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Micromachines - ISSN 2072-666X