September 2010 - 4 articles
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement. The method is applicable to beams oriented either in a plane parall...
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving...
The performance of micro-mixers is evaluated in terms of deviations from perfectly mixed state and mixing length (i.e., device length required to achieve perfect mixing). Different variations of T-mixer are reported for improved mixing performance, i...
When I joined a course on microsensors given by Steve Senturia, Martin Schmidt, and Roger Howe at MIT in 1988, I saw the first video of the earliest rotating silicon micromotor. It was the beginning of a high-time of microelectromechanical systems (M...
Get Alerted
Add your email address to receive forthcoming issues of this journal.
