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Open AccessArticle

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

1
Transducers Science and Technology (TST) Group, MESA+ Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands
2
Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, Japan
*
Author to whom correspondence should be addressed.
Micromachines 2010, 1(2), 48-67; https://doi.org/10.3390/mi1020048
Received: 19 May 2010 / Revised: 6 July 2010 / Accepted: 12 July 2010 / Published: 16 July 2010
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, electrically grounded surface. By combining the novel design with an innovative micromachining method based on vertical trench isolation, we have greatly simplified the fabrication of the shuffle motors and significantly improved their overall performance characteristics and reliability. Depending on the propulsion voltage, our motor with external dimensions of 290 μm × 410 mm displays two distinct operational modes with adjustable step sizes varying respectively from 0.6 to 7 nm and from 49 to 62 nm. The prototype was driven up to a cycling frequency of 80 kHz, showing nearly linear dependence of its velocity with frequency and a maximum velocity of 3.6 mm/s. For driving voltages of 55 V, the device had a maximum travel range of ±70 μm and exhibited an output force of 1.7 mN, resulting in the highest force and power densities reported so far for an electrostatic micromotor. After five days of operation, it had traveled a cumulative distance of more than 1.5 km in 34 billion steps without noticeable deterioration in performance. View Full-Text
Keywords: electrostatic micromotor; stepper micromotor; shuffle motor; inchworm motion; surface micromachining; trench isolation electrostatic micromotor; stepper micromotor; shuffle motor; inchworm motion; surface micromachining; trench isolation
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Sarajlic, E.; Yamahata, C.; Berenschot, E.; Tas, N.; Fujita, H.; Krijnen, G. High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines 2010, 1, 48-67.

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