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Journal: Materials, 2023
Volume: 16
Number: 2550
Article:
The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process
Authors:
by
Filip Ilie, Ileana-Liliana Minea, Constantin Daniel Cotici and Andrei-Florin Hristache
Link:
https://www.mdpi.com/1996-1944/16/7/2550
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