Carmona-Cejas, J.M.; Mirea, T.; Nieto, J.; Olivares, J.; Felmetsger, V.; Clement, M.
Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films. Materials 2023, 16, 2169.
https://doi.org/10.3390/ma16062169
AMA Style
Carmona-Cejas JM, Mirea T, Nieto J, Olivares J, Felmetsger V, Clement M.
Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films. Materials. 2023; 16(6):2169.
https://doi.org/10.3390/ma16062169
Chicago/Turabian Style
Carmona-Cejas, José Manuel, Teona Mirea, Jesús Nieto, Jimena Olivares, Valery Felmetsger, and Marta Clement.
2023. "Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films" Materials 16, no. 6: 2169.
https://doi.org/10.3390/ma16062169
APA Style
Carmona-Cejas, J. M., Mirea, T., Nieto, J., Olivares, J., Felmetsger, V., & Clement, M.
(2023). Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films. Materials, 16(6), 2169.
https://doi.org/10.3390/ma16062169