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Seong I, Kim S, Choi M, Lee W, Jeong W, Cho C, You Y, Lee Y, Seol Y, You S. Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma. Materials. 2023; 16(17):5746. https://doi.org/10.3390/ma16175746

Seong, Inho, Sijun Kim, Minsu Choi, Woobeen Lee, Wonnyoung Jeong, Chulhee Cho, Yebin You, Youngseok Lee, Youbin Seol, and Shinjae You. 2023. "Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma" Materials 16, no. 17: 5746. https://doi.org/10.3390/ma16175746

Seong, I., Kim, S., Choi, M., Lee, W., Jeong, W., Cho, C., You, Y., Lee, Y., Seol, Y., & You, S. (2023). Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma. Materials, 16(17), 5746. https://doi.org/10.3390/ma16175746