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Journal: Materials, 2023
Volume: 16
Number: 62
62
Article: Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State
Authors: by Siqi Zhang, Yiran Liu, Weimin Li, Jun Cao, Jiaye Huang, Lei Zhu and Zijun Guan
Link: https://www.mdpi.com/1996-1944/16/1/62

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