Next Article in Journal
An Open Localization and Local Communication Embodied Sensor
Next Article in Special Issue
Performance of a Diaphragmed Microlens for a Packaged Microspectrometer
Previous Article in Journal
Pattern Recognition via PCNN and Tsallis Entropy
Previous Article in Special Issue
NeuroMEMS: Neural Probe Microtechnologies
Article

A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751 Republic of Korea
*
Authors to whom correspondence should be addressed.
Sensors 2008, 8(11), 7530-7544; https://doi.org/10.3390/s8117530
Received: 27 October 2008 / Revised: 10 November 2008 / Accepted: 10 November 2008 / Published: 25 November 2008
(This article belongs to the Special Issue BioMEMS)
This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress induced moment, and then applied to the microcantilever free end to produce deflection. The stress analysis of the proposed and conventional designs is performed, followed by dynamic analysis of the proposed design. We found that the Sader equation is more accurate than Stoney in predicting cantilever deflections, and that for increasing the sensitivity of a microcantilever biosensor increasing the cantilever thickness is more practical. View Full-Text
Keywords: Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation
Show Figures

MDPI and ACS Style

Ansari, M.Z.; Cho, C. A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors. Sensors 2008, 8, 7530-7544. https://doi.org/10.3390/s8117530

AMA Style

Ansari MZ, Cho C. A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors. Sensors. 2008; 8(11):7530-7544. https://doi.org/10.3390/s8117530

Chicago/Turabian Style

Ansari, Mohd. Z., and Chongdu Cho. 2008. "A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors" Sensors 8, no. 11: 7530-7544. https://doi.org/10.3390/s8117530

Find Other Styles

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Back to TopTop