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Journal: SensorsVolume: 25Number: 5906
Article: Large-Area Nanostructure Fabrication with a 75 nm Half-Pitch Using Deep-UV Flat-Top Laser Interference Lithography
- Authors:
- Kexin Jiang 1,†,
- Mingliang Xie 1,† and
- Dongxu Yang 3,*
- et al.
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