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Journal: Sensors, 2025
Volume: 25
Number: 5906
Article:
Large-Area Nanostructure Fabrication with a 75 nm Half-Pitch Using Deep-UV Flat-Top Laser Interference Lithography
Authors:
by
Kexin Jiang, Mingliang Xie, Zhe Tang, Xiren Zhang and Dongxu Yang
Link:
https://www.mdpi.com/1424-8220/25/18/5906
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