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Journal: SensorsVolume: 23Number: 9219
Article: Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing
- Authors:
- Jules Tillement1,2,3,*,
- Cyril Cervera2 and
- Jacques Baylet2
- et al.
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