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Journal: Sensors, 2019
Volume: 19
Number: 3522

Article: Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure
Authors: by Haiwang Li, Yanxin Zhai, Zhi Tao, Yingxuan Gui and Xiao Tan
Link: https://www.mdpi.com/1424-8220/19/16/3522

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