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Journal: Sensors, 2016
Volume: 16
Number: 711

Article: Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer
Authors: by Yonggang Yin, Boqian Sun and Fengtian Han
Link: https://www.mdpi.com/1424-8220/16/5/711

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