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Journal: Sensors, 2016
Volume: 16
Number: 711
Article:
Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer
Authors:
by
Yonggang Yin, Boqian Sun and Fengtian Han
Link:
https://www.mdpi.com/1424-8220/16/5/711
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