RF-MEMS technology has evolved significantly over the years, during which various attempts have been made to tailor such devices for extreme performance by leveraging novel designs and fabrication processes, as well as integrating unique materials; h...
In the field of robotic fault detection, although the random forest (RF) algorithm is widely adopted, its limited accuracy remains a critical constraint in practical engineering applications. To address this technical challenge, this study proposes a...
Conventional parallel capacitive RF MEMS switches have a large impact during the suction phase. In general, RF MEMS switches have to be switched on and off in a considerably fast manner. Increasing the driving voltage enables fast switching but also...
Thermoelectric generators (TEGs) are now capable of powering the abundant low power electronics from very small (just a few degrees Celsius) temperature gradients. This factor along with the continuously lowering cost and size of TEGs, has contribute...
Micro-electromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on t...
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile tel...
A magnetostrictive FeNi-coated surface acoustic wave (SAW)-based current sensor was proposed in this work. The weak remanence and hysteresis effect of the FeNi itself contributes to suppress the asymmetry in sensor response at increasing and decreasi...
With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order a...
In this study, aluminum gallium nitride (AlGaN) thin films are used as the piezoelectric layers to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices. AlGaN film is deposited on a Bragg reflector, composed of three pa...
In this study, piezoelectric zinc oxide (ZnO) thin film was deposited on the Pt/Ti/SiNx/Si substrate to construct the FBAR device. The Pt/Ti multilayers were deposited on SiNx/Si as the bottom electrode and the Al thin film was deposited on the ZnO p...
With the booming development of the 5G market in recent years, super-high frequency (SHF) resonators will play an increasingly critical role in 5G and future communication systems. Facing the growing market demand for miniaturized, high-bandwidth, an...