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16 pages, 2030 KiB  
Article
Study on Comb-Drive MEMS Acceleration Sensor Used for Medical Purposes: Monitoring of Balance Disorders
by Michał Szermer and Jacek Nazdrowicz
Electronics 2025, 14(15), 3033; https://doi.org/10.3390/electronics14153033 - 30 Jul 2025
Viewed by 219
Abstract
This article presents a comprehensive modeling and simulation framework for a capacitive MEMS accelerometer integrated with a sigma-delta analog-to-digital converter (ADC), with a focus on applications in wearable health and motion monitoring devices. The accelerometer used in the system is connected to a [...] Read more.
This article presents a comprehensive modeling and simulation framework for a capacitive MEMS accelerometer integrated with a sigma-delta analog-to-digital converter (ADC), with a focus on applications in wearable health and motion monitoring devices. The accelerometer used in the system is connected to a smartphone equipped with dedicated software and will be used to assess the risk of falling, which is crucial for patients with balance disorders. The authors designed the accelerometer with special attention paid to the specification required in a system, where the acceleration is ±2 g and the frequency is 100 Hz. They investigated the sensor’s behavior in the DC, AC, and time domains, capturing both the mechanical response of the proof mass and the resulting changes in output capacitance due to external acceleration. A key component of the simulation is the implementation of a second-order sigma-delta modulator designed to digitize the small capacitance variations generated by the sensor. The Simulink model includes the complete signal path from analog input to quantization, filtering, decimation, and digital-to-analog reconstruction. By combining MEMS+ modeling with MATLAB-based system-level simulations, the workflow offers a fast and flexible alternative to traditional finite element methods and facilitates early-stage design optimization for MEMS sensor systems intended for real-world deployment. Full article
(This article belongs to the Special Issue Wearable Sensors for Human Position, Attitude and Motion Tracking)
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21 pages, 3942 KiB  
Article
Experimental Demonstration of Terahertz-Wave Signal Generation for 6G Communication Systems
by Yazan Alkhlefat, Amr M. Ragheb, Maged A. Esmail, Sevia M. Idrus, Farabi M. Iqbal and Saleh A. Alshebeili
Optics 2025, 6(3), 34; https://doi.org/10.3390/opt6030034 - 28 Jul 2025
Viewed by 447
Abstract
Terahertz (THz) frequencies, spanning from 0.1 to 1 THz, are poised to play a pivotal role in the development of future 6G wireless communication systems. These systems aim to utilize photonic technologies to enable ultra-high data rates—on the order of terabits per second—while [...] Read more.
Terahertz (THz) frequencies, spanning from 0.1 to 1 THz, are poised to play a pivotal role in the development of future 6G wireless communication systems. These systems aim to utilize photonic technologies to enable ultra-high data rates—on the order of terabits per second—while maintaining low latency and high efficiency. In this work, we present a novel photonic method for generating sub-THz vector signals within the THz band, employing a semiconductor optical amplifier (SOA) and phase modulator (PM) to create an optical frequency comb, combined with in-phase and quadrature (IQ) modulation techniques. We demonstrate, both through simulation and experimental setup, the generation and successful transmission of a 0.1 THz vector. The process involves driving the PM with a 12.5 GHz radio frequency signal to produce the optical comb; then, heterodyne beating in a uni-traveling carrier photodiode (UTC-PD) generates the 0.1 THz radio frequency signal. This signal is transmitted over distances of up to 30 km using single-mode fiber. The resulting 0.1 THz electrical vector signal, modulated with quadrature phase shift keying (QPSK), achieves a bit error ratio (BER) below the hard-decision forward error correction (HD-FEC) threshold of 3.8 × 103. To the best of our knowledge, this is the first experimental demonstration of a 0.1 THz photonic vector THz wave based on an SOA and a simple PM-driven optical frequency comb. Full article
(This article belongs to the Section Photonics and Optical Communications)
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16 pages, 4017 KiB  
Article
High-Performance Acousto-Optic Modulators for Improving the Recognition Accuracy of Weak Microwave Signals by Radio Frequency Identification Systems
by Weijia Zhang, Xueting Luo, Qiancheng Rao and Peng Jiang
Electronics 2025, 14(4), 658; https://doi.org/10.3390/electronics14040658 - 8 Feb 2025
Viewed by 794
Abstract
By leveraging the high sensitivity of acousto-optic modulators to microwave signals, their integration into RFID systems can significantly improve the detection of faint microwave signals. Traditional acousto-optic modulators, which use bidirectional uniform comb transducers (IDTs), suffer from a 50% microwave signal loss due [...] Read more.
By leveraging the high sensitivity of acousto-optic modulators to microwave signals, their integration into RFID systems can significantly improve the detection of faint microwave signals. Traditional acousto-optic modulators, which use bidirectional uniform comb transducers (IDTs), suffer from a 50% microwave signal loss due to the diffraction efficiency being less than 50%, complicating the accurate identification of already weak signals. This paper presents a solution to the 50% loss issue by replacing the IDT with a floating electrode unidirectional transducer (FEUDT), a key structure in detecting microwave signals. The resulting samples exhibited an optical waveguide insertion loss of 8.73 dB, a mode field diameter of 6.48 μm, an operating frequency of 141.2 MHz, and a diffraction efficiency of 61.72%, and required only 0.57 W of driving power. Comparative empirical tests with traditional transducers under identical conditions demonstrated that the FEUDT-based acousto-optic modulator surpassed the 50% diffraction efficiency limit of conventional modulators, which facilitated the detection of weak microwave signals. Full article
(This article belongs to the Special Issue RFID Applied to IoT Devices)
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15 pages, 6575 KiB  
Article
Tunable Characteristics of Optical Frequency Combs from InGaAs/GaAs Two-Section Mode-Locked Lasers
by Dengqun Weng, Yanbo Liang, Zhongliang Qiao, Xiang Li, Jia Xu Brian Sia, Zaijin Li, Lin Li, Hao Chen, Zhibin Zhao, Yi Qu, Guojun Liu, Chongyang Liu and Hong Wang
Sensors 2024, 24(24), 7905; https://doi.org/10.3390/s24247905 - 11 Dec 2024
Viewed by 1053
Abstract
We observed tunable characteristics of optical frequency combs (OFCs) generated from InGaAs/GaAs double quantum wells (DQWs) asymmetric waveguide two-section mode-locked lasers (TS-MLLs). This involves an asymmetric waveguide mode-locked semiconductor laser (AWML-SL) operating at a center wavelength of net modal gain of approximately 1.06 [...] Read more.
We observed tunable characteristics of optical frequency combs (OFCs) generated from InGaAs/GaAs double quantum wells (DQWs) asymmetric waveguide two-section mode-locked lasers (TS-MLLs). This involves an asymmetric waveguide mode-locked semiconductor laser (AWML-SL) operating at a center wavelength of net modal gain of approximately 1.06 µm, which indicates a stable pulse shape, with the power-current(P-I) characteristic curve revealing a small difference between forward and reverse drive currents in the gain region. Under different operating conditions, the laser exhibits the characteristics of OFCs. And the pulse interval in the timing and the peak interval in the frequency domain show a periodic alternating change trend with the increase in the gain current. This tunable characteristic is reported for the first time. The study demonstrates the feasibility of generating tunable optical combs using a monolithic integrated two-section mode-locked semiconductor laser (MI-TS-MLL). This has important reference value for the application of OFCs generated from MI-TS-MLLs or integrated optical chips. Full article
(This article belongs to the Section Optical Sensors)
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9 pages, 2649 KiB  
Article
Photonic Generation of Multiband and Multi-Format Chirped Microwave Waveforms Based on an Optoelectronic Oscillator
by Jinfeng Du, Fangping Li, Huiyun Tang, Zexuan Kong, Ming Li and Wei Li
Photonics 2024, 11(12), 1163; https://doi.org/10.3390/photonics11121163 - 11 Dec 2024
Viewed by 941
Abstract
We propose and demonstrate a microwave photonic system to generate multiband and multi-format microwave waveforms based on an actively mode-locked optoelectronic oscillator (AML-OEO) using a dual-polarization dual-drive Mach–Zehnder modulator (DPol-DDMZM). In the proposed system, the upper DDMZM is injected by two baseband single-chirped [...] Read more.
We propose and demonstrate a microwave photonic system to generate multiband and multi-format microwave waveforms based on an actively mode-locked optoelectronic oscillator (AML-OEO) using a dual-polarization dual-drive Mach–Zehnder modulator (DPol-DDMZM). In the proposed system, the upper DDMZM is injected by two baseband single-chirped signals, and the lower DDMZM is biased to realize single-sideband (SSB) modulation using a 90° hybrid coupler. The lower DDMZM is also used to construct an AML-OEO loop, which outputs microwave frequency comb signals. By setting the phase difference in the applied two single-chirped signals, multiband up-, down-, and dual-chirped microwave signals are successfully generated. Furthermore, the tunability of the system can be realized by adjusting the frequency and power of the injection signal in the AML-OEO loop, the passband of the electrical filter, and the chirp rate of the single-chirped signal. The proposed scheme is theoretically analyzed and experimentally verified. Full article
(This article belongs to the Special Issue Optoelectronic Oscillators (OEO): Principles and Applications)
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29 pages, 25007 KiB  
Review
Advancing Molecular Spectroscopy Efficiency with Extensive Parallelism
by Jiaqi Li, Rodrigo Fernandez, Bernardo Gutierrez, Jan Pedersen and Yan Zhou
Metrology 2024, 4(4), 736-764; https://doi.org/10.3390/metrology4040043 - 5 Dec 2024
Viewed by 2143
Abstract
Molecular spectroscopy, with a legacy spanning over a century, has profoundly enriched our understanding of the microscopic world, driving major advancements across science and engineering. Over time, this field has steadily advanced, incorporating innovations such as lasers and digital computers to reach new [...] Read more.
Molecular spectroscopy, with a legacy spanning over a century, has profoundly enriched our understanding of the microscopic world, driving major advancements across science and engineering. Over time, this field has steadily advanced, incorporating innovations such as lasers and digital computers to reach new levels of precision and sensitivity. Over the past decade, the integration of high-speed embedded electronic systems and advanced light sources has ushered molecular spectroscopy into a new era, characterized by extensive parallelism and enhanced sensitivity. This review delves into two pioneering technologies that embody recent advancements in molecular spectroscopy: Chirped-Pulse Fourier Transform Microwave (CP-FTMW) spectroscopy and optical frequency comb (OFC) spectroscopy. We provide an overview of the fundamental principles behind these methods, examine their most impactful applications across diverse fields, and discuss their potential to drive future developments in molecular spectroscopy. By highlighting these technologies, we aim to underscore the transformative impact of integrating high-speed digital electronics and advanced light sources with molecular spectroscopy, enabling extensive parallelism and paving the way for groundbreaking discoveries and innovations in this rapidly evolving field. Full article
(This article belongs to the Special Issue Advancements in Optical Measurement Devices and Technologies)
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16 pages, 6182 KiB  
Article
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
by Yameng Shan, Lei Qian, Kaixuan He, Bo Chen, Kewei Wang, Wenchao Li and Wenjiang Shen
Micromachines 2024, 15(12), 1421; https://doi.org/10.3390/mi15121421 - 26 Nov 2024
Cited by 4 | Viewed by 3551
Abstract
The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion axis of electrostatic MEMS micromirrors to detect the [...] Read more.
The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion axis of electrostatic MEMS micromirrors to detect the deflection angle. The design uses a multi-layer bonding process to realize a vertical comb-driven structure. The device structure is designed as a double-layer structure, in which the top layer is the ground layer and integrates with piezoresistive sensor. This approach avoids crosstalk between the applied drive voltage and the piezoresistive sensor. This design also optimizes the sensor’s size, improving sensitivity. A MEMS two-dimensional (2D) scanning micromirror with a 1 mm mirror diameter was designed and fabricated. The test results indicated that, in a vacuum environment, the torsional resonance frequencies of the micromirror’s fast axis and slow axis were 17.68 kHz and 2.225 kHz, respectively. When driving voltages of 33 V and 40 V were applied to the fast axis and slow axis of the micromirror, the corresponding optical scanning angles were 55° and 45°, respectively. The piezoresistive sensor effectively detects the micromirror’s deflection state, and optimizing the sensor’s size achieved a sensitivity of 13.87 mV/V/°. The output voltage of the piezoresistive sensor shows a good linear relationship with the micromirror’s deflection angle, enabling closed-loop feedback control of the electrostatic MEMS micromirror. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators, 2nd Edition)
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24 pages, 2010 KiB  
Protocol
Switching Mediterranean Consumers to Mediterranean Sustainable Healthy Dietary Patterns (SWITCHtoHEALTHY): Study Protocol of a Multicentric and Multi-Cultural Family-Based Nutritional Intervention Study
by Lorena Calderón-Pérez, Alícia Domingo, Josep M. del Bas, Biotza Gutiérrez, Anna Crescenti, Djamel Rahmani, Amèlia Sarroca, José Maria Gil, Kenza Goumeida, Tianyu Zhang Jin, Metin Güldaş, Çağla Erdoğan Demir, Asmaa El Hamdouchi, Lazaros P. Gymnopoulos, Kosmas Dimitropoulos, Perla Degli Innocenti, Alice Rosi, Francesca Scazzina, Eva Petri, Leyre Urtasun, Giuseppe Salvio, Marco de la Feld and Noemi Boquéadd Show full author list remove Hide full author list
Nutrients 2024, 16(22), 3938; https://doi.org/10.3390/nu16223938 - 18 Nov 2024
Cited by 2 | Viewed by 2267
Abstract
Background/Objectives: Populations in Mediterranean countries are abandoning the traditional Mediterranean diet (MD) and lifestyle, shifting towards unhealthier habits due to profound cultural and socioeconomic changes. The SWITCHtoHEALTHY project aims to demonstrate the effectiveness of a multi-component nutritional intervention to improve the adherence of [...] Read more.
Background/Objectives: Populations in Mediterranean countries are abandoning the traditional Mediterranean diet (MD) and lifestyle, shifting towards unhealthier habits due to profound cultural and socioeconomic changes. The SWITCHtoHEALTHY project aims to demonstrate the effectiveness of a multi-component nutritional intervention to improve the adherence of families to the MD in three Mediterranean countries, thus prompting a dietary behavior change. Methods: A parallel, randomized, single-blinded, and controlled multicentric nutritional intervention study will be conducted over 3 months in 480 families with children and adolescents aged 3–17 years from Spain, Morocco, and Turkey. The multi-component intervention will combine digital interactive tools, hands-on educational materials, and easy-to-eat healthy snacks developed for this study. Through the developed SWITCHtoHEALTHY app, families will receive personalized weekly meal plans, which also consider what children eat at school. The engagement of all family members will be prompted by using a life simulation game. In addition, a set of activities and educational materials for adolescents based on a learning-through-playing approach will be codesigned. Innovative and sustainable plant-based snacks will be developed and introduced into the children’s dietary plan as healthy alternatives for between meals. By using a full-factorial design, families will be randomized into eight groups (one control and seven interventions) to test the independent and combined effects of each component (application and/or educational materials and/or snacks). The impact of the intervention on diet quality, economy, and the environment, as well as on classical anthropometric parameters and vital signs, will be assessed in three different visits. The COM-B behavioral model will be used to assess essential factors driving the behavior change. The main outcome will be adherence to the MD assessed through MEDAS in adults and KIDMED in children and adolescents. Conclusions: SWITCHtoHEALTHY will provide new insights into the use of sustained models for inducing dietary and lifestyle behavior changes in the family setting. It will facilitate generating, boosting, and maintaining the switch to a healthier MD dietary pattern across the Mediterranean area. Registered Trial, National Institutes of Health, ClinicalTrials.gov (NCT06057324). Full article
(This article belongs to the Special Issue Advances in Sustainable Healthy Diets)
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19 pages, 1011 KiB  
Article
The Path Driving China’s Energy Structure Transformation from the Perspective of Policy Tools
by Jintao Li, Hui Sun, Long Cheng and Lei Chu
Sustainability 2024, 16(19), 8703; https://doi.org/10.3390/su16198703 - 9 Oct 2024
Cited by 2 | Viewed by 1789
Abstract
Combing through Chinese energy-related policy texts and exploring the development path of energy restructuring are significant steps towards a better understanding of the history of energy restructuring in the process of building a moderately prosperous society in all aspects. To explore the various [...] Read more.
Combing through Chinese energy-related policy texts and exploring the development path of energy restructuring are significant steps towards a better understanding of the history of energy restructuring in the process of building a moderately prosperous society in all aspects. To explore the various paths driving the transformation of China’s energy structure, the energy policies promulgated at the national level from 2001 to 2020 in China were systematically compiled. Based on the policy tool perspective, a theoretical framework for influencing China’s energy structure transition was proposed in three dimensions: objectives, tools, and intensity. A total of 39 national energy policy texts were analyzed using a fuzzy set qualitative comparative analysis method. The results show that (1) the consistency levels of individual preconditions were all below 0.9, which does not constitute a necessary condition for the transformation of China’s energy structure; (2) the sufficiency analysis identified three paths of China’s energy structure transformation, which can be described as models driven by “multiple objectives + information”, “single objective + information”, and “single objective”; (3) energy restructuring is a goal-oriented process; the clarity and certainty of the efficient and green objectives of energy policies have a facilitating effect on energy restructuring, and the support of information technology provides an important guarantee for energy restructuring; (4) compared with European and American countries, it was found that China’s energy policy tools were characterized by an emphasis on macro-planning, insufficient connectivity, and marked tendencies in practice. Full article
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10 pages, 1932 KiB  
Article
Simulation Study on Attosecond Inverse Compton Scattering Source from Laser Wakefield Acceleration with Near-Threshold Ionization Injection
by Aihua Deng, Yan Li, Yugan Weng, Zhiling Luo, Xitao Yu and Jiaolong Zeng
Appl. Sci. 2024, 14(17), 7749; https://doi.org/10.3390/app14177749 - 2 Sep 2024
Viewed by 1213
Abstract
We present the generation of attosecond gamma rays via inverse Compton scattering within the framework of laser wakefield acceleration through 2D Particle-In-Cell simulations. Utilizing the near-threshold ionization injection mechanism, an attosecond micro-bunched electron beam characterized by a comb-like current density profile can be [...] Read more.
We present the generation of attosecond gamma rays via inverse Compton scattering within the framework of laser wakefield acceleration through 2D Particle-In-Cell simulations. Utilizing the near-threshold ionization injection mechanism, an attosecond micro-bunched electron beam characterized by a comb-like current density profile can be achieved with a linearly polarized laser at an intensity of a0 = 1.5. The micro-bunched beam provides a beam energy of approximately 300 MeV and achieves a minimum relative energy spread of about 1.64% after undergoing 2 mm of acceleration. In the inverse Compton scattering scheme, these attosecond electron micro-bunches interact with the reflected driving laser pulse, resulting in the attosecond gamma-ray radiation exhibiting similar structures. Individual spatial-separated gamma-ray pulses exhibit a length of approximately 260–300 as, with a critical energy of 2.0 ± 0.2 MeV. The separated attosecond gamma-ray source owns a peak brilliance of ~1022 photons s−1 mm−2 mrad−2 0.1% BW. This brilliance is competitive in a laboratory for multi-MeV γ-ray sources with a laser intensity of I = 5 × 1018 W/cm2. Such attosecond gamma-ray radiation offers promising applications requiring ultrashort X-ray/gamma ray sources. Full article
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12 pages, 1071 KiB  
Article
A Numerical Study of Microwave Frequency Comb Generation in a Semiconductor Laser Subject to Modulated Optical Injection and Optoelectronic Feedback
by Chenpeng Xue, Wei Chen, Beibei Zhu, Zuxing Zhang and Yanhua Hong
Photonics 2024, 11(8), 741; https://doi.org/10.3390/photonics11080741 - 8 Aug 2024
Cited by 1 | Viewed by 1317
Abstract
This study presents a comprehensive numerical investigation on the generation of a microwave frequency comb (MFC) using a semiconductor laser subjected to periodic-modulated optical injection. To enhance performance, optoelectronic feedback is incorporated through a dual-drive Mach–Zehnder modulator. The results show that the first [...] Read more.
This study presents a comprehensive numerical investigation on the generation of a microwave frequency comb (MFC) using a semiconductor laser subjected to periodic-modulated optical injection. To enhance performance, optoelectronic feedback is incorporated through a dual-drive Mach–Zehnder modulator. The results show that the first optoelectronic feedback loop, with a delay time inversely proportional to the modulation frequency, can optimize MFC generation through a mode-locking effect and the second optoelectronic feedback loop with a multiple delay time of the first one can further enhance the performance of the MFC. The comb linewidth appears to decrease with the increase in the second-loop delay time in the power function. These results are consistent with experimental observations reported in the literature. We also explore the impact of the feedback index on comb contrast, the statistical characteristics of the central 128 lines within the MFC, and side peak suppression. The simulation results demonstrate the presence of an optimal feedback index. The study also reveals that linewidth reduction, through increasing the feedback index and delay time, comes at the cost of declining side peak suppression. These findings collectively contribute to a deeper understanding of the factors influencing MFC generation and pave the way for the design and optimization of high-performance MFC systems for various applications. Full article
(This article belongs to the Special Issue New Perspectives in Microwave Photonics)
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15 pages, 8091 KiB  
Article
An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array
by Andreas Neudert, Peter Duerr and Mario Nitzsche
Micromachines 2024, 15(8), 942; https://doi.org/10.3390/mi15080942 - 24 Jul 2024
Viewed by 2721
Abstract
We are developing a phase-modulating micro mirror-array spatial light modulator to be used for real holography within the EU-funded project REALHOLO, featuring millions of pixels that can be individually positioned in a piston mode at a large frame rate. We found earlier that [...] Read more.
We are developing a phase-modulating micro mirror-array spatial light modulator to be used for real holography within the EU-funded project REALHOLO, featuring millions of pixels that can be individually positioned in a piston mode at a large frame rate. We found earlier that an electrostatic comb-drive array offers the best performance for the actuators: sufficient yoke forces for fast switching even at low voltages compatible with the CMOS addressing backplane. In our first design, the well-known electrostatic cross-talk issue had already been much smaller than would have been possible for parallel-plate actuators, but it was still larger than the precision requirements for high-image-quality holography. In this paper, we report on our analysis of the crucial regions for the electrostatic cross-talk and ways to reduce it while observing manufacturing constraints as well as avoiding excessively high field strengths that might lead to electrical breakdown. Finally, we present a solution that, in FEM simulations, reduces the remaining cross-talk to well below the required specification limit. This solution can be manufactured without any additional processing steps and suffers only a very small reduction of the yoke forces. Full article
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33 pages, 9944 KiB  
Article
An Experimental Investigation of Noise Sources’ Contribution in the Multi-Chip Module Open-Loop Comb-Drive Capacitive MEMS Accelerometer
by Mariusz Jankowski, Michał Szermer, Piotr Zając, Piotr Amrozik, Cezary Maj, Jacek Nazdrowicz, Grzegorz Jabłoński and Bartosz Sakowicz
Electronics 2024, 13(13), 2599; https://doi.org/10.3390/electronics13132599 - 2 Jul 2024
Cited by 1 | Viewed by 4209
Abstract
The paper presents the noise analysis of a MEMS and ASIC readout integrated circuit (ROIC) constituting the accelerometer developed in the frame of the InnoReh project, aiming at the development of methods for monitoring patients with imbalance disorders. Several experiments were performed at [...] Read more.
The paper presents the noise analysis of a MEMS and ASIC readout integrated circuit (ROIC) constituting the accelerometer developed in the frame of the InnoReh project, aiming at the development of methods for monitoring patients with imbalance disorders. Several experiments were performed at different temperatures and in different configurations: ROIC alone, ROIC with emulated parasitic capacitances, MEMS and ROIC in separate packages, and MEMS and ROIC in a single package. Many noise/interference sources were considered. The results obtained experimentally were compared to the results of theoretical investigations and were within the same order of magnitude, although in practice, the observed noise was always greater than the theoretical estimation. The paper also includes an in-depth analysis to explain these differences. Moreover, it is argued that, in terms of noise, the MEMS sensing element, and not the ROIC, is the quality-limiting factor. Full article
(This article belongs to the Section Microelectronics)
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3 pages, 1736 KiB  
Abstract
Tilted Triangular Springs with Constant-Force Reaction
by Lisa Schmitt, Philip Schmitt and Martin Hoffmann
Proceedings 2024, 97(1), 222; https://doi.org/10.3390/proceedings2024097222 - 6 Jun 2024
Viewed by 3765
Abstract
Guiding mechanisms are among the most elementary components of in-plane micro-electro-mechanical systems (MEMS). Usually, a spring is desired that is compliant in only one direction and stiff in other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers [...] Read more.
Guiding mechanisms are among the most elementary components of in-plane micro-electro-mechanical systems (MEMS). Usually, a spring is desired that is compliant in only one direction and stiff in other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the force reaction in the displacement direction and implements a constant-force reaction whereby the maximum selectivity of the tilted triangular spring is shifted to larger displacements. Thus, the tilted triangular springs can increase the lateral stability of comb-drive actuators. We show tilted triangular springs exhibiting constant forces in a deflection range of about 75 µm to 175 µm. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
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19 pages, 6973 KiB  
Article
Curved and Annular Diaphragm Coupled Piezoelectric Micromachined Ultrasonic Transducers for High Transmit Biomedical Applications
by Yun Zhang, Tong Jin, Zijie Zhao, Chenfang Yan, Xinchao Lu, Hang Gao and Chengjun Huang
Sensors 2024, 24(9), 2714; https://doi.org/10.3390/s24092714 - 24 Apr 2024
Cited by 1 | Viewed by 2097
Abstract
In this paper, we present a novel three-dimensional (3D) coupled configuration of piezoelectric micromachined ultrasound transducers (pMUTs) by combing a curved and an annular diaphragm for transmit performance optimization in biomedical applications. An analytical equivalent circuit model (EQC) is developed with varied excitation [...] Read more.
In this paper, we present a novel three-dimensional (3D) coupled configuration of piezoelectric micromachined ultrasound transducers (pMUTs) by combing a curved and an annular diaphragm for transmit performance optimization in biomedical applications. An analytical equivalent circuit model (EQC) is developed with varied excitation methods to incorporate the acoustic–structure coupling of the curved and annular diaphragm-coupled pMUTs (CAC-pMUTs). The model-derived results align well with the reference simulated by the finite element method (FEM). Using this EQC model, we optimize the key design parameters of the CAC-pMUTs in order to improve the output sound pressure, including the width of the annular membrane, the thickness of the passive layer, and the phase difference of the driving voltage. In the anti-phase mode, the designed CAC-pMUTs demonstrate a transmit efficiency 285 times higher than that of single annular pMUTs. This substantial improvement underscores the potential of CAC-pMUTs for large array applications. Full article
(This article belongs to the Section Physical Sensors)
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