Optical Devices/Components/Coatings for Ultra-Precision Equipment
A special issue of Photonics (ISSN 2304-6732). This special issue belongs to the section "Optoelectronics and Optical Materials".
Deadline for manuscript submissions: closed (20 January 2025) | Viewed by 8355
Special Issue Editors
Interests: ultrathin metal film; metallic meshes; transparent EMI shielding structures; micro-nano fabrication technology; infrared/terahertz/microwave metamaterials/metasurfaces
Special Issue Information
Dear Colleagues,
Optical devices/components/coatings are key parts that determine the performance of high-end equipment in the fields of aerospace, national defense and military, and advanced civilian applications. Typical applications include high-resolution earth observation systems, aircraft optical seekers, large astronomical telescopes, X-ray telescopes, ultraviolet/extreme ultraviolet lithography machines, precision inertial devices, consumer electronics, medical equipment, and other equipment. The continuous improvement in the service capability of major equipment puts forward higher requirements for the performance of optical devices/components/coatings. For example, in the field of semiconductor chip manufacturing, extreme ultraviolet lithography technology is key for the international semiconductor industry to continue Moore's Law and ensure that the lithography resolution enters the 7 nm node. The extreme ultraviolet lithography objective lens needs to adapt to a series of stringent requirements represented by full-band and sub-nanometer precision manufacturing to ensure lithography performance. Optical devices/components/coatings find exciting applications in a vast range of fields, from physics, material science, and life science to industrial development.
This Special Issue aims to collect both review papers and original research articles in the field of optical devices/components/coatings for both fundamental and applied aspects. Theoretical and experimental papers and reviews will all be considered for publication. In addition, the topics to be covered in the Special Issue include, but are not limited to, the following: functional micro/nano structures, functional optical coatings, infrared/terahertz/microwave metamaterials/metasurfaces, flexible optical components, intelligent sensing components, photonics crystals, electromagnetic functional devices, precision measurement devices, optical measurement/metrology methods, multi-function measurement devices and systems, multi-degree of freedom measurement devices and systems, sensors, etc.
Dr. Heyan Wang
Dr. Liang Yu
Guest Editors
Manuscript Submission Information
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Keywords
- optical devices/components/coatings
- functional micro-nano structures
- EM metamaterials/metasurfaces
- optical measurement/metrology methods
- ultra-precision measurement and equipment
- sensors
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