Integrated MEMS Resonators

Dear Colleagues,

Microelectromechanical systems (MEMS) resonators have evolved significantly over the last decade. New micro-fabrication processes, temperature compensation methods, Q-factor enhancement techniques, packaging processes and other research breakthroughs have made the performance of MEMS resonators come very close to that of quartz crystals. Moreover, research works have demonstrated the integration potential of MEMS resonators within integrated circuits, providing new system-level capabilities. This has brought forward unprecedented levels of integration for timing circuits or resonant sensors, for example. Whether it is for the creation of sensors, energy harvesters or timing circuits, research on MEMS resonators is advancing steadily towards pushing this important MEMS device towards market on many fronts. Notably, MEMS resonators are already commercialized in timing circuits, and many resonant sensors relying on MEMS resonators have been proposed.

Accordingly, this special issue invites academic and industrial researchers to share their innovative works in integrated MEMS resonators and on the systems they enable. Suitable topics include, but are not limited to:

• MEMS Resonators
  • Design methodologies
  • Microfabrication processes
  • Packaging processes
  • Performance enhancement techniques (e.g., temperature compensation, Q-factor enhancement etc.)
  • Modeling
• Integrated MEMS Resonators-based Systems
  • Resonant sensors
  • Timing systems
  • Filters
  • Resonant energy harvesting
  • Ultrasonic transducers

Prof. Dr. Frederic Nabki
Guest Editor

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