Special Issue "Integrated MEMS Resonators"

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 April 2021.

Special Issue Editor

Prof. Dr. Frederic Nabki
Website
Guest Editor
Department of Electrical Engineering, École de Technologie Supérieure, Montréal, QC H3C 1K3, Canada
Interests: MEMS; MEMS resonators; micro-fabrication processes; RF integrated circuits; integrated photonics; sensing interface circuits; telecommunications
Special Issues and Collections in MDPI journals

Special Issue Information

Dear Colleagues,

Microelectromechanical systems (MEMS) resonators have evolved significantly over the last decade. New micro-fabrication processes, temperature compensation methods, Q-factor enhancement techniques, packaging processes and other research breakthroughs have made the performance of MEMS resonators come very close to that of quartz crystals. Moreover, research works have demonstrated the integration potential of MEMS resonators within integrated circuits, providing new system-level capabilities. This has brought forward unprecedented levels of integration for timing circuits or resonant sensors, for example. Whether it is for the creation of sensors, energy harvesters or timing circuits, research on MEMS resonators is advancing steadily towards pushing this important MEMS device towards market on many fronts. Notably, MEMS resonators are already commercialized in timing circuits, and many resonant sensors relying on MEMS resonators have been proposed.

Accordingly, this special issue invites academic and industrial researchers to share their innovative works in integrated MEMS resonators and on the systems they enable. Suitable topics include, but are not limited to:

  • MEMS Resonators
    • Design methodologies
    • Microfabrication processes
    • Packaging processes
    • Performance enhancement techniques (e.g., temperature compensation, Q-factor enhancement etc.)
    • Modeling
  • Integrated MEMS Resonators-based Systems
    • Resonant sensors
    • Timing systems
    • Filters
    • Resonant energy harvesting
    • Ultrasonic transducers

Prof. Dr. Frederic Nabki
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1800 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Integrated MEMS resonator-based systems
  • MEMS resonators
  • Resonant sensors
  • Resonant structures
  • MEMS-based timing circuits

Published Papers (2 papers)

Order results
Result details
Select all
Export citation of selected articles as:

Research

Open AccessArticle
Attitude and Heading Estimation for Indoor Positioning Based on the Adaptive Cubature Kalman Filter
Micromachines 2021, 12(1), 79; https://doi.org/10.3390/mi12010079 - 13 Jan 2021
Abstract
The demands for indoor positioning in location-based services (LBS) and applications grow rapidly. It is beneficial for indoor positioning to combine attitude and heading information. Accurate attitude and heading estimation based on magnetic, angular rate, and gravity (MARG) sensors of micro-electro-mechanical systems (MEMS) [...] Read more.
The demands for indoor positioning in location-based services (LBS) and applications grow rapidly. It is beneficial for indoor positioning to combine attitude and heading information. Accurate attitude and heading estimation based on magnetic, angular rate, and gravity (MARG) sensors of micro-electro-mechanical systems (MEMS) has received increasing attention due to its high availability and independence. This paper proposes a quaternion-based adaptive cubature Kalman filter (ACKF) algorithm to estimate the attitude and heading based on smart phone-embedded MARG sensors. In this algorithm, the fading memory weighted method and the limited memory weighted method are used to adaptively correct the statistical characteristics of the nonlinear system and reduce the estimation bias of the filter. The latest step data is used as the memory window data of the limited memory weighted method. Moreover, for restraining the divergence, the filter innovation sequence is used to rectify the noise covariance measurements and system. Besides, an adaptive factor based on prediction residual construction is used to overcome the filter model error and the influence of abnormal disturbance. In the static test, compared with the Sage-Husa cubature Kalman filter (SHCKF), cubature Kalman filter (CKF), and extended Kalman filter (EKF), the mean absolute errors (MAE) of the heading pitch and roll calculated by the proposed algorithm decreased by 4–18%, 14–29%, and 61–77% respectively. In the dynamic test, compared with the above three filters, the MAE of the heading reduced by 1–8%, 2–18%, and 2–21%, and the mean of location errors decreased by 9–22%, 19–31%, and 32–54% respectively by using the proposed algorithm for three participants. Generally, the proposed algorithm can effectively improve the accuracy of heading. Moreover, it can also improve the accuracy of attitude under quasistatic conditions. Full article
(This article belongs to the Special Issue Integrated MEMS Resonators)
Open AccessArticle
Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes
Micromachines 2021, 12(1), 61; https://doi.org/10.3390/mi12010061 - 06 Jan 2021
Abstract
For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied [...] Read more.
For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied in a push-pull driven disk resonator gyroscope (DRG) to improve its sensitivity by an electrical pump, causing an arbitrary increase of the “effective Q”. However, due to the differential characteristics of the push-pull driving method, the traditional parametric excitation method is not applicable. As a result, two novel methods are proposed and experimentally carried out to achieve parametric excitation in the push-pull driven DRGs, resulting in a maximum “effective Q” of 2.24 × 106 in the experiment, about a 7.6 times improvement over the intrinsic Q. Besides, subharmonic excitation is also theoretically analyzed and experimentally characterized. The stability boundary of parametric excitation, defined by a threshold voltage, is theoretically predicted and verified by related experiments. It is demonstrated that, when keeping the gyroscope’s vibration at a constant amplitude, the fundamental frequency driving voltage will decrease with the increasing of the parametric voltage and will drop to zero at its threshold value. In this case, the gyroscope operates in a generalized parametric resonance condition, which is called subharmonic excitation. The novel parametric and subharmonic excitation theories displayed in this paper are proven to be efficient and tunable dynamical methods with great potential for adjusting the quality factor flexibly, which can be used to further enhance the resonator’s performance. Full article
(This article belongs to the Special Issue Integrated MEMS Resonators)
Show Figures

Figure 1

Back to TopTop