Special Issue "Integrated MEMS Resonators"
Deadline for manuscript submissions: 30 April 2021.
Interests: MEMS; MEMS resonators; micro-fabrication processes; RF integrated circuits; integrated photonics; sensing interface circuits; telecommunications
Special Issues and Collections in MDPI journals
Microelectromechanical systems (MEMS) resonators have evolved significantly over the last decade. New micro-fabrication processes, temperature compensation methods, Q-factor enhancement techniques, packaging processes and other research breakthroughs have made the performance of MEMS resonators come very close to that of quartz crystals. Moreover, research works have demonstrated the integration potential of MEMS resonators within integrated circuits, providing new system-level capabilities. This has brought forward unprecedented levels of integration for timing circuits or resonant sensors, for example. Whether it is for the creation of sensors, energy harvesters or timing circuits, research on MEMS resonators is advancing steadily towards pushing this important MEMS device towards market on many fronts. Notably, MEMS resonators are already commercialized in timing circuits, and many resonant sensors relying on MEMS resonators have been proposed.
Accordingly, this special issue invites academic and industrial researchers to share their innovative works in integrated MEMS resonators and on the systems they enable. Suitable topics include, but are not limited to:
- MEMS Resonators
- Design methodologies
- Microfabrication processes
- Packaging processes
- Performance enhancement techniques (e.g., temperature compensation, Q-factor enhancement etc.)
- Integrated MEMS Resonators-based Systems
- Resonant sensors
- Timing systems
- Resonant energy harvesting
- Ultrasonic transducers
Prof. Dr. Frederic Nabki
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1800 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- Integrated MEMS resonator-based systems
- MEMS resonators
- Resonant sensors
- Resonant structures
- MEMS-based timing circuits