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Article

Control of Spring Softening and Hardening in the Squared Daisy

1
Department of Electrical Engineering, École de Technologie Supérieure, Université du Québec, Montréal, QC H3C 1K3, Canada
2
Department of Electrical and Computer Engineering, McGill University, Montréal, QC H3A 0G4, Canada
*
Author to whom correspondence should be addressed.
Academic Editor: Romeo Bernini
Micromachines 2021, 12(4), 448; https://doi.org/10.3390/mi12040448
Received: 23 February 2021 / Revised: 27 March 2021 / Accepted: 7 April 2021 / Published: 16 April 2021
(This article belongs to the Special Issue Integrated MEMS Resonators)
Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work, a mechanical MEMS structure allowing the designer to determine the type of nonlinearity, that is, softening or hardening, based on its anchor scheme is presented. Effects of the excitation signal on the behavior of the proposed MEMS in the frequency domain are investigated. In this regard, a comprehensive experimental comparison among the nonlinear behaviors of softening and hardening has been conducted. To reduce the hysteresis effect to a minimum, an excitation approach, which is a pulsed sweep in frequency with a discrete resolution, is presented. The maximal velocity, quality factor, bandwidth, and resonant frequency of these two types of nonlinear MEMS resonators are compared under three different types of excitation. Finally, it is shown that the performance and characteristics extracted from nonlinear mechanical MEMS resonating structures are highly dependent on the excitation method. Hence, in the present case, the apparent performances of the MEMS resonator can increase by up to 150% or decrease by up to 21%, depending on the excitation approaches. This implies the necessity of a standardized testing methodology for nonlinear MEMS resonators for given end applications. View Full-Text
Keywords: resonant behavior characterization; duffing resonators; hardening; softening; non-linearity; micro-resonator; piezoelectric transducer; frequency response resonant behavior characterization; duffing resonators; hardening; softening; non-linearity; micro-resonator; piezoelectric transducer; frequency response
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MDPI and ACS Style

Gratuze, M.; Alameh, A.-H.; Nabavi, S.; Nabki, F. Control of Spring Softening and Hardening in the Squared Daisy. Micromachines 2021, 12, 448. https://doi.org/10.3390/mi12040448

AMA Style

Gratuze M, Alameh A-H, Nabavi S, Nabki F. Control of Spring Softening and Hardening in the Squared Daisy. Micromachines. 2021; 12(4):448. https://doi.org/10.3390/mi12040448

Chicago/Turabian Style

Gratuze, Mathieu, Abdul-Hafiz Alameh, Seyedfakhreddin Nabavi, and Frederic Nabki. 2021. "Control of Spring Softening and Hardening in the Squared Daisy" Micromachines 12, no. 4: 448. https://doi.org/10.3390/mi12040448

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