GaN Power Devices: Recent Advances, Applications, and Perspectives

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D1: Semiconductor Devices".

Deadline for manuscript submissions: closed (30 November 2025) | Viewed by 2399

Special Issue Editors


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Guest Editor
Fujitsu Laboratories Ltd., Kanagawa 211-8588, Japan
Interests: GaN power devices; interface states; semiconductor physics

E-Mail Website
Guest Editor
Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan
Interests: research and development of GaN power electronics

Special Issue Information

Dear Colleagues,

In recent years, remarkable progress has been made in the development of lateral and vertical gallium nitride (GaN)-based power devices. In particular, high-performance lateral multi-channel AlGaN/GaN Schottky barrier diodes with a breakdown voltage over 10 kV, vertical p–n diodes with a blocking voltage greater than 6 kV and very high Baliga's figure-of-merits, vertical junction barrier Schottky diodes with a low on-resistance below than 1 mΩ·cm2, and vertical FETs with a blocking voltage greater than 1 kV and specific on-resistances less than 2 mΩ·cm2 have been successfully demonstrated. In addition, various novel GaN-based edge termination structures have been proposed and demonstrated, including moat etch termination, a hydrogen plasma-based edge termination structure, a NiO junction termination extension (JTE) structure, a step-etched JTE structure, Mg-ion implanted field limiting rings, and a Mg-ion implanted bevel edge termination structure. 

The aim of this Special Issue is to present high-quality contributions that address the latest challenges in GaN power devices and applications. The topics of interest include, but are not limited to, the following themes:

  1. Novel edge termination methods and techniques;
  2. Novel device architectures and concepts;
  3. Fabrication technology, reliability, and characterization;
  4. Simulation and design.

Dr. Maciej Matys
Prof. Dr. Tetsu Kachi
Guest Editors

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Keywords

  • lateral and vertical GaN Power devices
  • edge termination for GaN Power devices
  • TCAD modeling of GaN power devices
  • characterization and processing technology of GaN power electronics
  • reliability

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Published Papers (1 paper)

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Review

30 pages, 16390 KB  
Review
Auger Electron Spectroscopy for Chemical Analysis of Passivated (Al,Ga)N-Based Systems
by Alina Domanowska and Bogusława Adamowicz
Micromachines 2026, 17(1), 47; https://doi.org/10.3390/mi17010047 - 30 Dec 2025
Viewed by 939
Abstract
This review summarizes the use of Auger Electron Spectroscopy (AES) for microchemical analysis of two different types of dielectric/(Al,Ga)N-based systems: (i) extrinsic dielectric PECVD SiO2, ALD Al2O3, and ECR-CVD SiNx films on AlxGa1−x [...] Read more.
This review summarizes the use of Auger Electron Spectroscopy (AES) for microchemical analysis of two different types of dielectric/(Al,Ga)N-based systems: (i) extrinsic dielectric PECVD SiO2, ALD Al2O3, and ECR-CVD SiNx films on AlxGa1−xN/GaN structures in the context of their application in microelectronic power devices and (ii) intrinsic Al2O3 films on AlN epitaxial layers grown by high-temperature oxidation for nanostructured technology of various gas/ion sensors. Particular attention is given to AES depth profiling across complete multilayer cross-sections, combining qualitative analysis of spectral line shape and intensity evolution as well as kinetic energy shifts with quantitative elemental depth distributions. This approach enables identification of chemical states and oxidation-related transformations at dielectric/semiconductor interfaces. Reported results demonstrate that AES provides micro- to nanometer-scale chemical information essential for distinguishing interfacial from the bulk properties. The capabilities and inherent limitations of AES depth profiling, including sputter-induced artifacts are also addressed, highlighting the role of optimized experimental conditions in reliable interface analysis. Full article
(This article belongs to the Special Issue GaN Power Devices: Recent Advances, Applications, and Perspectives)
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