Power MEMS 2019

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (30 April 2020) | Viewed by 12142

Special Issue Editors


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Guest Editor
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 50-372 Wroclaw, Poland
Interests: MEMS; silicon-glass technology; sensors and sensor systems
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 50-372 Wroclaw, Poland
Interests: lab-on-chip; silicon-glass technology; 3D printing
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

This Special Issue will publish selected papers from the 19th International Conference on Micro and Nonotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2019, December 2–6, 2019, Kraków, Poland.

We encourage you to publish significant and original works covering the following main topics:

  1. Materials for energy conversion;
  2. Mechanical energy harvesting and actuation;
  3. Thermal and chemical science and technologies for power, propulsion, and cooling;
  4. Direct thermal energy-harvesting;
  5. Electron, ion, photon, and radiation energy conversion;
  6. Biochemical and bio-inspired power/energy systems;
  7. Electrical energy harvesting, management, storage and transfer;
  8. Applications and Innovations in micro energy systems;
  9. PowerMEMS-in-Action.

Dr. Paweł Knapkiewicz
Prof. Rafał Walczak
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Energy conversion
  • Energy harvesting
  • Energy
  • Power
  • MEMS
  • Microsystems

Published Papers (4 papers)

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Research

14 pages, 2548 KiB  
Article
PiezoMEMS Nonlinear Low Acceleration Energy Harvester with an Embedded Permanent Magnet
by Nathan Jackson
Micromachines 2020, 11(5), 500; https://doi.org/10.3390/mi11050500 - 15 May 2020
Cited by 7 | Viewed by 2130
Abstract
Increasing the power density and bandwidth are two major challenges associated with microelectromechanical systems (MEMS)-based vibration energy harvesting devices. Devices implementing magnetic forces have been used to create nonlinear vibration structures and have demonstrated limited success at widening the bandwidth. However, monolithic integration [...] Read more.
Increasing the power density and bandwidth are two major challenges associated with microelectromechanical systems (MEMS)-based vibration energy harvesting devices. Devices implementing magnetic forces have been used to create nonlinear vibration structures and have demonstrated limited success at widening the bandwidth. However, monolithic integration of a magnetic proof mass and optimizing the magnet configuration have been challenging tasks to date. This paper investigates three different magnetic configurations and their effects on bandwidth and power generation using attractive and repulsive magnetic forces. A piezoMEMS device was developed to harvest vibration energy, while monolithically integrating a thick embedded permanent magnet (NdFeB) film. The results demonstrated that repulsive forces increased the bandwidth for in-plane and out-of-plane magnetic configurations from <1 to >7 Hz bandwidths. In addition, by using attractive forces between the magnets, the power density increased while decreasing the bandwidth. Combining these forces into a single device resulted in increased power and increased bandwidth. The devices created in this paper focused on low acceleration values (<0.1 g) and low-frequency applications. Full article
(This article belongs to the Special Issue Power MEMS 2019)
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10 pages, 678 KiB  
Article
Performance Enhancement of an Ultrasonic Power Transfer System Through a Tightly Coupled Solid Media Using a KLM Model
by Bibhu Kar and Ulrike Wallrabe
Micromachines 2020, 11(4), 355; https://doi.org/10.3390/mi11040355 - 30 Mar 2020
Cited by 16 | Viewed by 3341
Abstract
Contactless ultrasonic power transmission (UPT) through a metal barrier has become an exciting field of research, as metal barriers prevent the use of electromagnetic wireless power transfer due to Faraday shielding effects. In this paper, we demonstrate power transfer through a metal wall [...] Read more.
Contactless ultrasonic power transmission (UPT) through a metal barrier has become an exciting field of research, as metal barriers prevent the use of electromagnetic wireless power transfer due to Faraday shielding effects. In this paper, we demonstrate power transfer through a metal wall with the use of ultrasonic waves generated from a piezoelectric transducer. Accurate characterization and modeling of the transducer and investigation of the influence of the acoustic properties of the transmitting medium are instrumental for the performance prediction and optimal design of an ultrasonic power link. In this work, we applied the KLM model for the emitting and receiving transducers, with respect to the transmitting medium and model for both the emission and reception function. A practical UPT system was built by mechanically coupling and co-axially aligning two composite transducers on opposite sides of a transmitting medium wall. The optimal transmission performance of the ultrasonic power link through thickness-stretch vibrations of the wall together with two piezoelectric transducers working in TE mode was determined. Eventually, the operating frequency and ohmic loading condition for maximum power transmission were obtained for two different media, aluminium and polyoxymethylene (POM), with contrasting specific acoustic impedances. The results showed that the measured optimal electric loads and operating frequency for maximum power transfer agreed well with the theoretical predictions. Full article
(This article belongs to the Special Issue Power MEMS 2019)
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7 pages, 3479 KiB  
Article
An Origami Heat Radiation Fin for Use in a Stretchable Thermoelectric Generator
by Momoe Akuto and Eiji Iwase
Micromachines 2020, 11(3), 263; https://doi.org/10.3390/mi11030263 - 04 Mar 2020
Cited by 10 | Viewed by 3187
Abstract
Recently, some studies have addressed the use of a folded substrate to realize stretchable electronic devices including stretchable thermoelectric generators (TEGs). However, the utilization of the folded substrate as a heat radiation fin has not been achieved. Herein, we have proposed the construction [...] Read more.
Recently, some studies have addressed the use of a folded substrate to realize stretchable electronic devices including stretchable thermoelectric generators (TEGs). However, the utilization of the folded substrate as a heat radiation fin has not been achieved. Herein, we have proposed the construction of a TEG with an origami-like folded structure substrate called an “origami-fin” that can achieve a high heat radiation performance and is also highly stretchable. The origami-fin increases the stretchability of the TEG by bending a non-stretchable material into a folded shape, and it also works as a heat radiator because of its large surface area compared to that of a flat structure. We evaluated the heat radiation performance of the origami-fin and the stability of the performance when it was stretched. The results demonstrate that the origami-fin works as a heat radiator and enhances the output of the TEG, while also exhibiting a high stretchability with only a slight output reduction. Full article
(This article belongs to the Special Issue Power MEMS 2019)
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10 pages, 4138 KiB  
Article
Simple and Efficient AlN-Based Piezoelectric Energy Harvesters
by Imrich Gablech, Jaroslav Klempa, Jan Pekárek, Petr Vyroubal, Jan Hrabina, Miroslava Holá, Jan Kunz, Jan Brodský and Pavel Neužil
Micromachines 2020, 11(2), 143; https://doi.org/10.3390/mi11020143 - 28 Jan 2020
Cited by 18 | Viewed by 2835
Abstract
In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 [...] Read more.
In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters. Full article
(This article belongs to the Special Issue Power MEMS 2019)
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