Special Issue "Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II"

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 March 2023 | Viewed by 1354

Special Issue Editors

Prof. Dr. Weidong Wang
E-Mail Website
Guest Editor
School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China
Interests: MEMS; NEMS; micro/nano mechanics; flexible sensors
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Yong Ruan
E-Mail Website
Guest Editor
Department of Precision Instruments,Tsinghua University, Beijing 100084, China
Interests: MEMS/NEMS; silicon based surface/bulk and fabrication technology; MEMS Relay; MEMS pressure sensor; harsh environment MEMS devices; chip-scale atomic devices and system
Prof. Dr. Zai-Fa Zhou
E-Mail Website
Guest Editor
School of Electronic Science and Technology, Southeast University, Nanjing 210096, China
Interests: MEMS CAD; MEMS/NEMS design method; Micro/nano fabrication technology; In-situ test of material parameters

Special Issue Information

Dear Colleagues,

With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano sensors and micro/nano actuators, have emerged in many application fields. These above devices are always made of silicon, metals, ceramics, glass, and so on, whose mechanical and electrical properties have great influence on their working characteristics, including accuracy, sensitivity and working range. In addition, the design and fabrication method can directly affect the reliability of those MEMS and NEMS devices, especially lifetime, robustness and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on design and fabrication of micro/nano sensors and actuators. Areas of interest include but are not limited to:

  • Structural design and optimization methods;
  • System modeling and simulation;
  • Advanced fabrication techniques;
  • In situ characterization and testing technology;
  • Reliability of devices and systems.

Prof. Dr. Weidong Wang
Prof. Dr. Yong Ruan
Prof. Dr. Zai-Fa Zhou
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2000 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS
  • NEMS
  • sensors
  • actuators
  • design and optimization
  • fabrication techniques
  • reliability
  • in situ test

Related Special Issue

Published Papers (2 papers)

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Research

Article
Effect of Annealing Time on the Cyclic Characteristics of Ceramic Oxide Thin Film Thermocouples
Micromachines 2022, 13(11), 1970; https://doi.org/10.3390/mi13111970 - 13 Nov 2022
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Abstract
Oxide thin film thermocouples (TFTCs) are widely used in high-temperature environment measurements and have the advantages of good stability and high thermoelectric voltage. However, different annealing processes affect the performance of TFTCs. This paper studied the impact of different annealing times on the [...] Read more.
Oxide thin film thermocouples (TFTCs) are widely used in high-temperature environment measurements and have the advantages of good stability and high thermoelectric voltage. However, different annealing processes affect the performance of TFTCs. This paper studied the impact of different annealing times on the cyclic characteristics of ceramic oxide thin film thermocouples. ITO/In2O3 TFTCs were prepared on alumina ceramics by a screen printing method, and the samples were annealed at different times. The microstructure of the ITO film was studied by scanning electron microscopy (SEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The results show that when the annealing temperature is fixed, the stability of the thermocouple is worst when it is annealed for 2 h. Extending the annealing time can improve the properties of the film, increase the density, slow down oxidation, and enhance the thermal stability of the thermocouple. The thermal cycle test results show that the sample can reach five temperature rise and fall cycles, more than 50 h, and can meet the needs of stable measurement in high temperature and harsh environments. Full article
(This article belongs to the Special Issue Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II)
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Article
3D Numerical Simulation and Structural Optimization for a MEMS Skin Friction Sensor in Hypersonic Flow
Micromachines 2022, 13(9), 1487; https://doi.org/10.3390/mi13091487 - 07 Sep 2022
Viewed by 471
Abstract
The skin friction of a hypersonic vehicle surface can account for up to 50% of the total resistance, directly affecting the vehicle’s effective range and load. A wind tunnel experiment is an important and effective method to optimize the aerodynamic shape of aircraft, [...] Read more.
The skin friction of a hypersonic vehicle surface can account for up to 50% of the total resistance, directly affecting the vehicle’s effective range and load. A wind tunnel experiment is an important and effective method to optimize the aerodynamic shape of aircraft, and Micro-Electromechanical System (MEMS) skin friction sensors are considered the promising sensors in hypersonic wind tunnel experiments, owing to their miniature size, high sensitivity, and stability. However, the sensitive structure including structural appearance, a gap with the package shell, and flatness of the sensor will change the measured flow field and cause the accurate measurement of friction resistance. Aiming at the influence of sensor-sensitive structure on wall-flow characteristics and friction measurement accuracy, the two-dimensional and three-dimensional numerical models of the sensor in the hypersonic flow field based on Computational Fluid Dynamics (CFD) are presented respectively in this work. The model of the sensor is verified by using the Blathius solution of two-dimensional laminar flow on a flat plate. The results show that the sensor model is in good agreement with the Blathius solution, and the error is less than 0.4%. Then, the influence rules of the sensitive structure of the sensor on friction measurement accuracy under turbulent flow and laminar flow conditions are systematically analyzed using 3D numerical models of the sensor, respectively. Finally, the sensor-sensitive unit structure’s design criterion is obtained to improve skin friction’s measurement accuracy. Full article
(This article belongs to the Special Issue Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II)
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