Special Issue "Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II"
Deadline for manuscript submissions: 30 March 2023 | Viewed by 1354
Interests: MEMS; NEMS; micro/nano mechanics; flexible sensors
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS/NEMS; silicon based surface/bulk and fabrication technology; MEMS Relay; MEMS pressure sensor; harsh environment MEMS devices; chip-scale atomic devices and system
With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano sensors and micro/nano actuators, have emerged in many application fields. These above devices are always made of silicon, metals, ceramics, glass, and so on, whose mechanical and electrical properties have great influence on their working characteristics, including accuracy, sensitivity and working range. In addition, the design and fabrication method can directly affect the reliability of those MEMS and NEMS devices, especially lifetime, robustness and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on design and fabrication of micro/nano sensors and actuators. Areas of interest include but are not limited to:
- Structural design and optimization methods;
- System modeling and simulation;
- Advanced fabrication techniques;
- In situ characterization and testing technology;
- Reliability of devices and systems.
Prof. Dr. Weidong Wang
Prof. Dr. Yong Ruan
Prof. Dr. Zai-Fa Zhou
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2000 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- design and optimization
- fabrication techniques
- in situ test
- Design and Fabrication of Micro/Nano Sensors and Actuators in Micromachines (11 articles)