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Micromachines
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IMCO 2019
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IMCO 2019

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (30 September 2019) | Viewed by 54005

Special Issue Editors

Prof. Dr. Tarik Bourouina

E-Mail Website
Guest Editor
ESIEE/Esycom-Lab, Cité Descartes 2 Bd Blaise Pascal, 93162 Noisy-le-Grand, France
Interests: water research; MEMS; micro-optics, nanotechnology, optical sensors
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Xuming Zhang

E-Mail Website
Guest Editor
Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong 999077, China
Interests: microfluidics; optofluidics; biomimetics; photocatalysis; plasmonics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Interplay of light with solid and liquid media in micro-/nanoscale is a multidisciplinary research and is making rapid progress in different research fields. This special issue follows up the 9th International Multidisciplinary Conference on Optofluidics (IMCO 2019, http://imco2019.org, 14-17 June 2019), and aims to publish short communications, full articles and topical reviews to update the multidisciplinary research frontiers of micro/nano-optics, nanophotonics, microfluidics and their devices/systems and applications. Other latest research results in the related fields such as coupled optofluidic phenomena, materials, fabrication, designs, modeling are also welcomed.

Prof. Tarik Bourouina
Prof. Xuming Zhang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (15 papers)

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Editorial

Jump to: Research, Review

2 pages, 158 KiB  
Editorial
Editorial for the Special Issue on IMCO 2019
by Tarik Bourouina and Xuming Zhang
Micromachines 2020, 11(7), 684; https://doi.org/10.3390/mi11070684 - 15 Jul 2020
Viewed by 1409
Abstract
This special issue is a collection of 12 technical papers and two reviews that are expanded into full-length articles from the conference abstracts of the 9th International Multidisciplinary Conference on Optofluidics (IMCO 2019) held in Hong Kong in 14–17 June 2019 [...] Full article
(This article belongs to the Special Issue IMCO 2019)

Research

Jump to: Editorial, Review

11 pages, 2962 KiB  
Article
Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy
by Alaa Fathy, Yasser M. Sabry, Martine Gnambodoe-Capochichi, Frederic Marty, Diaa Khalil and Tarik Bourouina
Micromachines 2020, 11(5), 463; https://doi.org/10.3390/mi11050463 - 28 Apr 2020
Cited by 4 | Viewed by 3292
Abstract
Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires further integration of a gas cell using the same [...] Read more.
Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires further integration of a gas cell using the same technologies towards full integration of a complete gas analysis system-on-chip. Here, we propose design guidelines and experimental validation of a gas cell fabricated using MEMS technology. The architecture is based on a circular multi-pass gas cell in a miniaturized form. Simulation results based on the proposed modeling scheme helps in determining the optimum dimensions of the gas cell, given the constraints of micro-fabrication. The carbon dioxide spectral signature is successfully measured using the proposed integrated multi-pass gas cell coupled with a MEMS-based spectrometer. Full article
(This article belongs to the Special Issue IMCO 2019)
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12 pages, 3771 KiB  
Article
An Integrated Optofluidic Platform Enabling Total Phosphorus On-Chip Digestion and Online Real-Time Detection
by Chang Li, Bingbing Wang, Hao Wan, Rongxiang He, Qi Li, Siyuan Yang, Wencan Dai and Ning Wang
Micromachines 2020, 11(1), 59; https://doi.org/10.3390/mi11010059 - 01 Jan 2020
Cited by 15 | Viewed by 3192
Abstract
This paper presents a total phosphorus online real-time monitoring system integrated with on-chip digestion based on the merits of optofluidic technology. The integrated optofluidic device contains a hollow optical fiber employed for pretreatment and digestion of phosphorus solution samples, a polydimethylsiloxane (PDMS)-based micromixer [...] Read more.
This paper presents a total phosphorus online real-time monitoring system integrated with on-chip digestion based on the merits of optofluidic technology. The integrated optofluidic device contains a hollow optical fiber employed for pretreatment and digestion of phosphorus solution samples, a polydimethylsiloxane (PDMS)-based micromixer with convergent–divergent walls designed to enable sufficient mixing and chromogenic reaction, and a couple of optical fiber collimators attached with a Z-shaped flow cell for optical detection. Details of system design and fabrication are introduced in this paper. In the experiment, on-chip digestion of four typical phosphates in aqueous solution including organophosphorus and inorganic phosphorus is investigated under different reaction conditions, such as digestion temperature, concentration of oxidant and pH value, and the optimal reaction parameters are explored under different conditions. Meanwhile, we demonstrate the online real-time monitoring function of the optofluidic device, and the digestion mechanisms of four different phosphates are analyzed and discussed. Compared with the national standard method, we find that the measurement accuracy and sensitivity are acceptable when the concentration of total phosphorus is between 0.005–0.9 mg/L (by weight of P) in aqueous solution, which covers the range defined in the national standard. The traditional digestion time of several hours is greatly reduced to less than 10 s, and the content of total phosphorus can be obtained in a few minutes. The integrated optofluidic device can significantly shorten the test time and reduce the sample amount, and also provides a versatile platform for the real-time detection and analysis of many biochemical samples. Full article
(This article belongs to the Special Issue IMCO 2019)
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Graphical abstract

11 pages, 4635 KiB  
Article
Microfluidic Reactors for Plasmonic Photocatalysis Using Gold Nanoparticles
by Huaping Jia, Yat Lam Wong, Aoqun Jian, Chi Chung Tsoi, Meiling Wang, Wanghao Li, Wendong Zhang, Shengbo Sang and Xuming Zhang
Micromachines 2019, 10(12), 869; https://doi.org/10.3390/mi10120869 - 11 Dec 2019
Cited by 16 | Viewed by 3646
Abstract
This work reports a microfluidic reactor that utilizes gold nanoparticles (AuNPs) for the highly efficient photocatalytic degradation of organic pollutants under visible light. The bottom of microchamber has a TiO2 film covering a layer of AuNPs (namely, TiO2/AuNP film) deposited [...] Read more.
This work reports a microfluidic reactor that utilizes gold nanoparticles (AuNPs) for the highly efficient photocatalytic degradation of organic pollutants under visible light. The bottom of microchamber has a TiO2 film covering a layer of AuNPs (namely, TiO2/AuNP film) deposited on the F-doped SnO2 (FTO) substrate. The rough surface of FTO helps to increase the surface area and the AuNPs enables the strong absorption of visible light to excite electron/hole pairs, which are then transferred to the TiO2 film for photodegradation. The TiO2 film also isolates the AuNPs from the solution to avoid detachment and photocorrosion. Experiments show that the TiO2/AuNP film has a strong absorption over 400–800 nm and enhances the reaction rate constant by 13 times with respect to the bare TiO2 film for the photodegradation of methylene blue. In addition, the TiO2/AuNP microreactor exhibits a negligible reduction of photoactivity after five cycles of repeated tests, which verifies the protective function of the TiO2 layer. This plasmonic photocatalytic microreactor draws the strengths of microfluidics and plasmonics, and may find potential applications in continuous photocatalytic water treatment and photosynthesis. The fabrication of the microreactor uses manual operation and requires no photolithography, making it simple, easy, and of low cost for real laboratory and field tests. Full article
(This article belongs to the Special Issue IMCO 2019)
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Graphical abstract

13 pages, 3184 KiB  
Article
Multifunctional Textile Platform for Fiber Optic Wearable Temperature-Monitoring Application
by Ziyang Xiang, Liuwei Wan, Zidan Gong, Zhuxin Zhou, Zhengyi Ma, Xia OuYang, Zijian He and Chi Chiu Chan
Micromachines 2019, 10(12), 866; https://doi.org/10.3390/mi10120866 - 10 Dec 2019
Cited by 18 | Viewed by 3447
Abstract
Wearable sensing technologies have been developed rapidly in the last decades for physiological and biomechanical signal monitoring. Much attention has been paid to functions of wearable applications, but comfort parameters have been overlooked. This research presents a developed fabric temperature sensor by adopting [...] Read more.
Wearable sensing technologies have been developed rapidly in the last decades for physiological and biomechanical signal monitoring. Much attention has been paid to functions of wearable applications, but comfort parameters have been overlooked. This research presents a developed fabric temperature sensor by adopting fiber Bragg grating (FBG) sensors and processing via a textile platform. This FBG-based quasi-distributed sensing system demonstrated a sensitivity of 10.61 ± 0.08 pm/°C with high stability in various temperature environments. No obvious wavelength shift occurred under the curvatures varying from 0 to 50.48 m−1 and in different integration methods with textiles. The temperature distribution monitored by the developed textile sensor in a complex environment with multiple heat sources was deduced using MATLAB to present a real-time dynamic temperature distribution in the wearing environment. This novel fabric temperature sensor shows high sensitivity, stability, and usability with comfort textile properties that are of great potential in wearable applications. Full article
(This article belongs to the Special Issue IMCO 2019)
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8 pages, 1867 KiB  
Article
The Effect of Oil Viscosity on Droplet Generation Rate and Droplet Size in a T-Junction Microfluidic Droplet Generator
by Junyi Yao, Fan Lin, Hyun Soo Kim and Jaewon Park
Micromachines 2019, 10(12), 808; https://doi.org/10.3390/mi10120808 - 23 Nov 2019
Cited by 35 | Viewed by 5355
Abstract
There have been growing interests in droplet-based microfluidics due to its capability to outperform conventional biological assays by providing various advantages, such as precise handling of liquid/cell samples, fast reaction time, and extremely high-throughput analysis/screening. The droplet-based microfluidics utilizes the interaction between the [...] Read more.
There have been growing interests in droplet-based microfluidics due to its capability to outperform conventional biological assays by providing various advantages, such as precise handling of liquid/cell samples, fast reaction time, and extremely high-throughput analysis/screening. The droplet-based microfluidics utilizes the interaction between the interfacial tension and the fluidic shear force to break continuous fluids into uniform-sized segments within a microchannel. In this paper, the effect of different viscosities of carrier oil on water-in-oil emulsion, particularly how droplet size and droplet generation rate are affected, has been investigated using a commonly used T-junction microfluidic droplet generator design connected to a pressure-controlled pump. We have tested mineral oils with four different viscosities (5, 7, 10, and 15 cSt) to compare the droplet generation under five different flow pressure conditions (i.e., water flow pressure of 30–150 mbar and oil flow pressure of 40–200 mbar). The results showed that regardless of the flow pressure levels, the droplet size decreased as the oil viscosity increased. Average size of the droplets decreased by approximately 32% when the viscosity of the oil changed from 5 to 15 cSt at the flow pressure of 30 mbar for water and 40 mbar for oil. Interestingly, a similar trend was observed in the droplet generation rate. Droplet generation rate and the oil viscosity showed high linear correlation (R2 = 0.9979) at the water flow pressure 30 mbar and oil flow pressure 40 mbar. Full article
(This article belongs to the Special Issue IMCO 2019)
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9 pages, 2912 KiB  
Article
Liquid-Crystal-Filled Side-hole Fiber for High-Sensitivity Temperature and Electric Field Measurement
by Yijian Huang, Ying Wang, Chun Mao, Jingru Wang, Han Wu, Changrui Liao and Yiping Wang
Micromachines 2019, 10(11), 761; https://doi.org/10.3390/mi10110761 - 10 Nov 2019
Cited by 9 | Viewed by 2111
Abstract
We propose a highly sensitive sensor based on a nematic liquid-crystal-filled side-hole fiber. The liquid crystal is precisely filled into an air hole of the optical fiber using a method of manually gluing in the fusion splicer. Due to the coupling between the [...] Read more.
We propose a highly sensitive sensor based on a nematic liquid-crystal-filled side-hole fiber. The liquid crystal is precisely filled into an air hole of the optical fiber using a method of manually gluing in the fusion splicer. Due to the coupling between the liquid crystal waveguide and the fiber core, multiple response dips appear in the transmission spectrum of the device. When an external temperature or electric field variation is applied to the liquid crystal and its refractive index changes, the transmission spectrum of this device will shift accordingly. Temperature and electric field response tests were performed on the device in the experiment, and the obtained temperature and electric field sensitivities were as high as −1.5 nm/°C and 3.88 nm/Vpp, respectively. For the exhibited advantages of being easy to manufacture, low cost, and high sensitivity, the proposed sensor is very promising for actual application in temperature or weak electric field monitoring. Full article
(This article belongs to the Special Issue IMCO 2019)
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7 pages, 2870 KiB  
Article
Fiber Taper-Based Mach–Zehnder Interferometer for Ethanol Concentration Measurement
by Changrui Liao, Feng Zhu, Peng Zhou and Ying Wang
Micromachines 2019, 10(11), 741; https://doi.org/10.3390/mi10110741 - 31 Oct 2019
Cited by 14 | Viewed by 3147
Abstract
We present a new type of fiber Mach–Zehnder interferometer based on a fiber taper and a pair of inner air bubbles for highly sensitive ethanol concentration measurement. The experimental results show there is a nonlinear relationship between the wavelength shift of the dip [...] Read more.
We present a new type of fiber Mach–Zehnder interferometer based on a fiber taper and a pair of inner air bubbles for highly sensitive ethanol concentration measurement. The experimental results show there is a nonlinear relationship between the wavelength shift of the dip located near 1485 nm and the ethanol concentration but in the concentration range from 0.3 to 0.7 it can be seen as a linear response with a sensitivity of 28 nm/vol. Full article
(This article belongs to the Special Issue IMCO 2019)
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8 pages, 2772 KiB  
Article
Gas Pressure Sensor Based on BDK-Doped Polymer Optical Fiber
by Xin Cheng, Yi Liu and Changyuan Yu
Micromachines 2019, 10(11), 717; https://doi.org/10.3390/mi10110717 - 24 Oct 2019
Cited by 17 | Viewed by 2844
Abstract
This paper presents a high sensitivity gas pressure sensor with benzyl-dimethylketal (BDK)-doped polymer optical fiber Bragg grating (POFBG), whose sensitivity is up to 8.12 pm/kPa and 12.12 pm/kPa in positive and negative pressure atmosphere, respectively. The high sensitivity can be explained by its [...] Read more.
This paper presents a high sensitivity gas pressure sensor with benzyl-dimethylketal (BDK)-doped polymer optical fiber Bragg grating (POFBG), whose sensitivity is up to 8.12 pm/kPa and 12.12 pm/kPa in positive and negative pressure atmosphere, respectively. The high sensitivity can be explained by its porous chemical structure. The stability and response behavior under air pressure atmosphere has also been investigated. The new understanding of the air pressure response principle and sensitivity difference for the presented sensor can be a worthy reference. Full article
(This article belongs to the Special Issue IMCO 2019)
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8 pages, 3589 KiB  
Article
Polarization-Dependent Lateral Optical Force of Subwavelength-Diameter Optical Fibers
by Xiangke Wang, Wanling Wu, Yipeng Lun, Huakang Yu, Qihua Xiong and Zhi-yuan Li
Micromachines 2019, 10(10), 630; https://doi.org/10.3390/mi10100630 - 21 Sep 2019
Cited by 1 | Viewed by 2123
Abstract
It is highly desirable to design optical devices with diverse optomechanical functions. Here, we investigate lateral optical force exerted on subwavelength-diameter (SD) optical fibers harnessed by input light modes with different polarizations. It is interesting to find that input light modes of circular [...] Read more.
It is highly desirable to design optical devices with diverse optomechanical functions. Here, we investigate lateral optical force exerted on subwavelength-diameter (SD) optical fibers harnessed by input light modes with different polarizations. It is interesting to find that input light modes of circular or elliptical polarizations would bring about lateral optical force in new directions, which has not been observed in previous studies. By means of finite-difference time-domain (FDTD) simulations, detailed spatial distributions of the asymmetric transverse force density are revealed, meanwhile dependence of optical force on input light polarizations, fiber diameters, and inclination angles of fiber endfaces are all carefully discussed. It is believed that polarization-sensitive reflection, refraction, and diffraction of optical fields occur at the interface, i.e., fiber oblique endfaces, resulting in asymmetrically distributed optical fields and thereafter non-zero transverse optical force. We believe our new findings could be helpful for constructing future steerable optomechanical devices with more flexibility. Full article
(This article belongs to the Special Issue IMCO 2019)
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13 pages, 2269 KiB  
Article
An Integrated Portable Multiplex Microchip Device for Fingerprinting Chemical Warfare Agents
by Karolina Petkovic, Anthony Swallow, Robert Stewart, Yuan Gao, Sheng Li, Fiona Glenn, Januar Gotama, Mel Dell’Olio, Michael Best, Justin Doward, Simon Ovendon and Yonggang Zhu
Micromachines 2019, 10(9), 617; https://doi.org/10.3390/mi10090617 - 16 Sep 2019
Cited by 11 | Viewed by 3330
Abstract
The rapid and reliable detection of chemical and biological agents in the field is important for many applications such as national security, environmental monitoring, infectious diseases screening, and so on. Current commercially available devices may suffer from low field deployability, specificity, and reproducibility, [...] Read more.
The rapid and reliable detection of chemical and biological agents in the field is important for many applications such as national security, environmental monitoring, infectious diseases screening, and so on. Current commercially available devices may suffer from low field deployability, specificity, and reproducibility, as well as a high false alarm rate. This paper reports the development of a portable lab-on-a-chip device that could address these issues. The device integrates a polymer multiplexed microchip system, a contactless conductivity detector, a data acquisition and signal processing system, and a graphic/user interface. The samples are pre-treated by an on-chip capillary electrophoresis system. The separated analytes are detected by conductivity-based microsensors. Extensive studies are carried out to achieve satisfactory reproducibility of the microchip system. Chemical warfare agents soman (GD), sarin (GB), O-ethyl S-[2-diisoproylaminoethyl] methylphsophonothioate (VX), and their degradation products have been tested on the device. It was demonstrated that the device can fingerprint the tested chemical warfare agents. In addition, the detection of ricin and metal ions in water samples was demonstrated. Such a device could be used for the rapid and sensitive on-site detection of both chemical and biological agents in the future. Full article
(This article belongs to the Special Issue IMCO 2019)
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9 pages, 3981 KiB  
Article
Highly Sensitive Temperature and Humidity Sensor Based on Carbon Nanotube-Assisted Mismatched Single-Mode Fiber Structure
by Weihao Yuan, Hao Qian, Yi Liu, Zhuo Wang and Changyuan Yu
Micromachines 2019, 10(8), 521; https://doi.org/10.3390/mi10080521 - 06 Aug 2019
Cited by 11 | Viewed by 2766
Abstract
Here we report on a miniaturized optical interferometer in one fiber based on two mismatched nodes. The all-fiber structure shows stable performance of temperature and humidity sensing. For temperature sensing in large ranges, from 40 to 100 °C, the sensor has a sensitivity [...] Read more.
Here we report on a miniaturized optical interferometer in one fiber based on two mismatched nodes. The all-fiber structure shows stable performance of temperature and humidity sensing. For temperature sensing in large ranges, from 40 to 100 °C, the sensor has a sensitivity of 0.24 dB/°C, and the adjusted R-squared value of fitting result reaches 0.99461 which shows a reliable sensing result. With carbon nanotubes coating the surface of the fiber, the temperature sensitivity is enhanced from 0.24561 to 1.65282 dB/°C in a small region, and the performance of humidity sensing becomes more linear and applicable. The adjusted R-squared value of the linear fitting line for humidity sensing shows a dramatic increase from 0.71731 to 0.92278 after carbon nanotube coating, and the humidity sensitivity presents 0.02571 nm/%RH. Full article
(This article belongs to the Special Issue IMCO 2019)
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9 pages, 2875 KiB  
Article
Liquid Refractive Index Measurement System Based on Electrowetting Lens
by Shi-Long Li, Zhong-Quan Nie, Yan-Ting Tian and Chao Liu
Micromachines 2019, 10(8), 515; https://doi.org/10.3390/mi10080515 - 01 Aug 2019
Cited by 7 | Viewed by 4260
Abstract
In this paper, a liquid refractive index (LRI) measurement system based on an electrowetting lens was proposed. The system is composed of a light source, a collimating lens, a liquid measurement chamber (LMC), an electrowetting lens and an image sensor, which is integrated [...] Read more.
In this paper, a liquid refractive index (LRI) measurement system based on an electrowetting lens was proposed. The system is composed of a light source, a collimating lens, a liquid measurement chamber (LMC), an electrowetting lens and an image sensor, which is integrated into a cylindrical cavity. The refractive index of the LMC changes with the addition of the measured liquid, and the incident light cannot be focused on the image plane. By adjusting the driving voltage of the electrowetting lens, the curvature of the liquid-liquid interface changes to focus the incident light onto the image plane. The refractive index of the liquid could be measured according to the voltage value. The proposed LRI measurement system has no mechanical moving parts, and the imaging surface remains stationary, which can make the measurement simply and correctly. The experiments show that the refractive index measurement range of the system can be turned from ~1.3300 to ~1.4040, and the measurement accuracy is 10−4. The system can be used to measure the optical properties of liquids and has broad potential applications in chemical reagent detection and pharmaceutical testing. Full article
(This article belongs to the Special Issue IMCO 2019)
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Review

Jump to: Editorial, Research

20 pages, 1729 KiB  
Review
Phage-based Electrochemical Sensors: A Review
by Jingting Xu, Ying Chau and Yi-kuen Lee
Micromachines 2019, 10(12), 855; https://doi.org/10.3390/mi10120855 - 06 Dec 2019
Cited by 38 | Viewed by 6224
Abstract
Phages based electrochemical sensors have received much attention due to their high specificity, sensitivity and simplicity. Phages or bacteriophages provide natural affinity to their host bacteria cells and can serve as the recognition element for electrochemical sensors. It can also act as a [...] Read more.
Phages based electrochemical sensors have received much attention due to their high specificity, sensitivity and simplicity. Phages or bacteriophages provide natural affinity to their host bacteria cells and can serve as the recognition element for electrochemical sensors. It can also act as a tool for bacteria infection and lysis followed by detection of the released cell contents, such as enzymes and ions. In addition, possible detection of the other desired targets, such as antibodies have been demonstrated with phage display techniques. In this paper, the recent development of phage-based electrochemical sensors has been reviewed in terms of the different immobilization protocols and electrochemical detection techniques. Full article
(This article belongs to the Special Issue IMCO 2019)
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21 pages, 4035 KiB  
Review
Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
by Shaowei He, Huimin Yang, Yunhui Jiang, Wenjun Deng and Weiming Zhu
Micromachines 2019, 10(8), 505; https://doi.org/10.3390/mi10080505 - 31 Jul 2019
Cited by 22 | Viewed by 6088
Abstract
The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, [...] Read more.
The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook. Full article
(This article belongs to the Special Issue IMCO 2019)
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