Micro/Nanofabrication of 2D Materials and Devices

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: closed (31 May 2026) | Viewed by 397

Editor

Advanced Nanomaterials and Devices Group, Department of Applied Physics and Science Education, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands
Interests: twistronics; straintronics; nanomechanics; 2D materials; freestanding complex oxides

Special Issue Information

Dear Colleagues,

Since graphene’s discovery two decades ago, the field of 2D materials has expanded rapidly in both material diversity and fabrication methodologies. Many significant advancements in 2D research stem directly from remarkable progress in nanofabrication techniques. These methods now enable unprecedented precision in manipulating atomically thin layers, offering exceptional control over parameters like strain, twist-angle, cleanliness, and stacking order.

A symbolic example of these enabling techniques is the evolution of exfoliation and transfer methods, culminating in the “tear-and-stack” approach. This innovation directly led to the discovery of emergent flat bands in twisted heterostructures. While this was predicted theoretically, their experimental realization was previously hindered by stringent precision requirements for twist-angle engineering. The “tear-and-stack” technique thus paved the way for unlocking novel phases of matter in 2D materials, underscoring how innovative nanofabrication can facilitate groundbreaking discoveries.

This special issue will highlight recent developments in the nanofabrication of 2D materials and related systems, including but not limited to the following:

  • Synthesis methods (deposition, growth, exfoliation, etc.)
  • Transfer and assembly techniques
  • Patterning techniques (etching, milling, ablation, lithography, etc.)
  • Characterization techniques
  • Contact engineering.

Dr. Martin Lee
Guest Editor

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Keywords

  • 2D materials
  • thin-films
  • graphene
  • exfoliation
  • transfer
  • (MO)CVD
  • PLD
  • MBE
  • growth
  • etching
  • deposition
  • van der Waals assembly
  • devices
  • sensors
  • condensed matter physics
  • lithography
  • nanofabrication
  • nano patterning
  • pattern transfer
  • 2D integration

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Published Papers (1 paper)

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Research

13 pages, 2709 KB  
Article
Lithography-Free Electrical Contact Method for Optoelectronic and Flexible Devices Based on Mechanically Exfoliated 2D Materials
by Paolo Salvemme, Diego Vennarini and Riccardo Frisenda
Micromachines 2026, 17(7), 844; https://doi.org/10.3390/mi17070844 - 16 Jul 2026
Abstract
We report a tabletop, versatile and lithography-free electrical contacting method for two-dimensional (2D) materials and van der Waals (vdW) heterostructures based on silver paint micromanipulation (SPMM). Operated under an ambient optical microscope, this additive, room-temperature approach circumvents the chemical solvents and high temperatures [...] Read more.
We report a tabletop, versatile and lithography-free electrical contacting method for two-dimensional (2D) materials and van der Waals (vdW) heterostructures based on silver paint micromanipulation (SPMM). Operated under an ambient optical microscope, this additive, room-temperature approach circumvents the chemical solvents and high temperatures associated with conventional cleanroom processing used in electrode fabrication. We validate the efficacy of this strategy by fabricating devices based on high-quality mechanically exfoliated thin flakes on both rigid SiO2/Si and flexible polycarbonate substrates. On rigid supports, SPMM-contact multilayer graphene devices exhibit linear Ohmic behavior with excellent environmental stability over multiple days and an ambipolar field effect. Gate-tunable multilayer graphene/few-layer MoS2/multilayer graphene field-effect transistors demonstrate n-type gating with a two-terminal carrier mobility of 60 cm2Vs and time-resolved photoresponse under 660 nm and 415 nm illumination, with responsivities as high as 10 A/W at the lowest incident powers. The SPMM method can also be carried out on flexible polymeric substrates such as polycarbonate, which is notoriously difficult to work with in microfabrication. We demonstrate a flexible multilayer graphene device that functions as highly responsive piezoresistive strain sensors at low deformations with a gauge factor of 50. Finally, a fully integrated flexible vdW photodetector is tested up to 1.2% uniaxial tensile strain. Despite experiencing local micro-fracturing of the MoS2 channel, the localized vdW junctions maintain robust charge collection, yielding photodetecting capabilities under tensile strain. This simple and cost-effective electrical contacting technique establishes a highly accessible platform for the rapid prototyping and mechanical testing of next-generation optoelectronics and flexible electronics based on 2D materials and vdW heterostructures. Full article
(This article belongs to the Special Issue Micro/Nanofabrication of 2D Materials and Devices)
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