Special Issue "Feature Papers to Celebrate the SCIE Coverage"

A special issue of Actuators (ISSN 2076-0825).

Deadline for manuscript submissions: 31 December 2020.

Special Issue Editor

Prof. Dr. Delbert Tesar
Website
Guest Editor
Robotics Research Group, The University of Texas at Austin, 1 University Station, R9925, Austin, TX 78712, USA
Interests: robotics, electro-mechanical actuators, embedded intelligence; open architecture vehicles, ships, aircraft, machinery for manufacturing; human rehabilitation systems; long duration lunar base habitat operation
Special Issues and Collections in MDPI journals

Special Issue Information

Dear Colleagues,

It is my great pleasure to announce that Actuators (ISSN 2076-0825) has been accepted for inclusion in the Science Citation Index Expanded (SCIE) in the Web of Science Core Collection. Actuators is due to receive its 2019 journal metrics in the June 2020 release of the Journal Citation Reports (Clarivate Analytics).

To celebrate this wonderful achievement, we are launching this Special Issue to publish top-quality papers from editorial board members and leading researchers invited by the editorial team. Papers could be both long research papers and papers describing the current state of the art in one of the areas covered by the journal. All papers will be published in open access and without any charges.

If you are interested in publishing your work in the Special Issue, please contact me or the editorial office.

Prof. Dr. Delbert Tesar
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access quarterly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1000 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (1 paper)

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Research

Open AccessFeature PaperArticle
A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices
Actuators 2020, 9(2), 24; https://doi.org/10.3390/act9020024 - 31 Mar 2020
Abstract
This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above [...] Read more.
This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors. Full article
(This article belongs to the Special Issue Feature Papers to Celebrate the SCIE Coverage)
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