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Article

Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

1
Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy
2
STMicroelectronics, Analog and MEMS Group, 20010 Milan, Italy
*
Author to whom correspondence should be addressed.
Academic Editors: Kenji Uchino and Eihab M. Abdel-Rahman
Actuators 2021, 10(2), 21; https://doi.org/10.3390/act10020021
Received: 20 December 2020 / Revised: 11 January 2021 / Accepted: 20 January 2021 / Published: 25 January 2021
(This article belongs to the Special Issue Feature Papers to Celebrate the SCIE Coverage)
In this work, we address the simulation and testing of MEMS micromirrors with hardening and softening behaviour excited with patches of piezoelectric materials. The forces exerted by the piezoelectric patches are modelled by means of the theory of ferroelectrics developed by Landau–Devonshire and are based on the experimentally measured polarisation hysteresis loops. The large rotations experienced by the mirrors also induce geometrical nonlinearities in the formulation up to cubic order. The solution of the proposed model is performed by discretising the device geometry using the Finite Element Method, and the resulting large system of coupled differential equations is solved by means of the Harmonic Balance Method. Numerical results were validated with experimental data collected on the devices. View Full-Text
Keywords: micromirros; harmonic balance; PZT; MEMS; modelling; nonlinear dynamics micromirros; harmonic balance; PZT; MEMS; modelling; nonlinear dynamics
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MDPI and ACS Style

Opreni, A.; Boni, N.; Carminati, R.; Frangi, A. Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method. Actuators 2021, 10, 21. https://doi.org/10.3390/act10020021

AMA Style

Opreni A, Boni N, Carminati R, Frangi A. Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method. Actuators. 2021; 10(2):21. https://doi.org/10.3390/act10020021

Chicago/Turabian Style

Opreni, Andrea, Nicolò Boni, Roberto Carminati, and Attilio Frangi. 2021. "Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method" Actuators 10, no. 2: 21. https://doi.org/10.3390/act10020021

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