Zehetner, J.; Kromka, A.; Izsák, T.; Vanko, G.; Gajdošová, L.; Kasemann, S.
Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications. Proceedings 2020, 56, 13.
https://doi.org/10.3390/proceedings2020056013
AMA Style
Zehetner J, Kromka A, Izsák T, Vanko G, Gajdošová L, Kasemann S.
Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications. Proceedings. 2020; 56(1):13.
https://doi.org/10.3390/proceedings2020056013
Chicago/Turabian Style
Zehetner, Johann, Alexander Kromka, Tibor Izsák, Gabriel Vanko, Lenka Gajdošová, and Stephan Kasemann.
2020. "Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications" Proceedings 56, no. 1: 13.
https://doi.org/10.3390/proceedings2020056013
APA Style
Zehetner, J., Kromka, A., Izsák, T., Vanko, G., Gajdošová, L., & Kasemann, S.
(2020). Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications. Proceedings, 56(1), 13.
https://doi.org/10.3390/proceedings2020056013