Chagin, M.N.; Sulyaeva, V.S.; Shayapov, V.R.; Kolodin, A.N.; Khomyakov, M.N.; Yushina, I.V.; Kosinova, M.L.
Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane. Coatings 2022, 12, 80.
https://doi.org/10.3390/coatings12010080
AMA Style
Chagin MN, Sulyaeva VS, Shayapov VR, Kolodin AN, Khomyakov MN, Yushina IV, Kosinova ML.
Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane. Coatings. 2022; 12(1):80.
https://doi.org/10.3390/coatings12010080
Chicago/Turabian Style
Chagin, Maksim N., Veronica S. Sulyaeva, Vladimir R. Shayapov, Aleksey N. Kolodin, Maksim N. Khomyakov, Irina V. Yushina, and Marina L. Kosinova.
2022. "Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane" Coatings 12, no. 1: 80.
https://doi.org/10.3390/coatings12010080
APA Style
Chagin, M. N., Sulyaeva, V. S., Shayapov, V. R., Kolodin, A. N., Khomyakov, M. N., Yushina, I. V., & Kosinova, M. L.
(2022). Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane. Coatings, 12(1), 80.
https://doi.org/10.3390/coatings12010080