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Article

Fabrication and Characterization of In0.9Ga0.1O EGFET pH Sensors

by 1,*, 2,3 and 2,3,*
1
Department of Optometry, Chung Hwa University of Medical Technology, Tainan 71703, Taiwan
2
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 70101, Taiwan
3
Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan
*
Authors to whom correspondence should be addressed.
Academic Editor: You Seung Rim
Coatings 2021, 11(8), 929; https://doi.org/10.3390/coatings11080929
Received: 21 June 2021 / Revised: 25 July 2021 / Accepted: 30 July 2021 / Published: 3 August 2021
In this study, the In0.9Ga0.1O sensing membrane were deposited by using the RF magnetron sputtering at room temperature and combined with commercial MOSFETs as the extended gate field effect transistor (EGFET) pH sensors. The sensing performance of the In0.9Ga0.1O EGFET pH sensors were measured and analyzed in the pH value of range between 2 to 12. In the saturation region, the pH current sensitivity calculated from the linear relationship between the IDS and pH value was approximately 56.64 μA/pH corresponding to the linearity of 97.8%. In the linear region, the pH voltage sensitivity exhibited high sensitivity and linearity of 43.7 mV/pH and 96.3%, respectively. The In0.9Ga0.1O EGFET pH sensors were successfully fabricated and exhibited great linearity. The analyzed results indicated that the In0.9Ga0.1O was a robust material as a promising sensing membrane and effectively used for pH sensing detection application. View Full-Text
Keywords: extended gate field effect transistor; In0.9Ga0.1O sensing membrane extended gate field effect transistor; In0.9Ga0.1O sensing membrane
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MDPI and ACS Style

Chen, C.-H.; Liu, S.-B.; Chang, S.-P. Fabrication and Characterization of In0.9Ga0.1O EGFET pH Sensors. Coatings 2021, 11, 929. https://doi.org/10.3390/coatings11080929

AMA Style

Chen C-H, Liu S-B, Chang S-P. Fabrication and Characterization of In0.9Ga0.1O EGFET pH Sensors. Coatings. 2021; 11(8):929. https://doi.org/10.3390/coatings11080929

Chicago/Turabian Style

Chen, Chia-Hsun, Shu-Bai Liu, and Sheng-Po Chang. 2021. "Fabrication and Characterization of In0.9Ga0.1O EGFET pH Sensors" Coatings 11, no. 8: 929. https://doi.org/10.3390/coatings11080929

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