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Journal: Nanomaterials, 2023
Volume: 13
Number: 1607

Article: Hardness, Modulus, and Refractive Index of Plasma-Assisted Atomic-Layer-Deposited Hafnium Oxide Thin Films Doped with Aluminum Oxide
Authors: by Mikk Kull, Helle-Mai Piirsoo, Aivar Tarre, Hugo Mändar, Aile Tamm and Taivo Jõgiaas
Link: https://www.mdpi.com/2079-4991/13/10/1607

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