Ruiz-DÃez, V.; Hernando-GarcÃa, J.; Toledo, J.; Ababneh, A.; Seidel, H.; Sánchez-Rojas, J.L.
Piezoelectric MEMS Linear Motor for Nanopositioning Applications. Actuators 2021, 10, 36.
https://doi.org/10.3390/act10020036
AMA Style
Ruiz-DÃez V, Hernando-GarcÃa J, Toledo J, Ababneh A, Seidel H, Sánchez-Rojas JL.
Piezoelectric MEMS Linear Motor for Nanopositioning Applications. Actuators. 2021; 10(2):36.
https://doi.org/10.3390/act10020036
Chicago/Turabian Style
Ruiz-DÃez, VÃctor, Jorge Hernando-GarcÃa, Javier Toledo, Abdallah Ababneh, Helmut Seidel, and José Luis Sánchez-Rojas.
2021. "Piezoelectric MEMS Linear Motor for Nanopositioning Applications" Actuators 10, no. 2: 36.
https://doi.org/10.3390/act10020036
APA Style
Ruiz-DÃez, V., Hernando-GarcÃa, J., Toledo, J., Ababneh, A., Seidel, H., & Sánchez-Rojas, J. L.
(2021). Piezoelectric MEMS Linear Motor for Nanopositioning Applications. Actuators, 10(2), 36.
https://doi.org/10.3390/act10020036