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Micromachines2023, 14(8), 1556;https://doi.org/10.3390/mi14081556

Journal: MicromachinesVolume: 14Number: 1556

Article: Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer

Authors:
Xiaorui Bie¹,
Xingyin Xiong¹ and
Xudong Zou^1,2,*
et al.

Link: https://www.mdpi.com/2072-666X/14/8/1556

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