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Micromachines, Volume 6, Issue 9

September 2015 - 12 articles

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Articles (12)

  • Article
  • Open Access
44 Citations
13,629 Views
13 Pages

Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

  • Meng Zhang,
  • Jian Yang,
  • Chaowei Si,
  • Guowei Han,
  • Yongmei Zhao and
  • Jin Ning

1 September 2015

In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and anoth...

  • Article
  • Open Access
8 Citations
5,495 Views
23 Pages

26 August 2015

In this work, we investigate the interaction of a nanoparticulate system for nanomedicine applications with the biological environment, i.e., the human body. Following the molecular communication paradigm, we assess how our nanoparticulate system mod...

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Micromachines - ISSN 2072-666X