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Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
- Meng Zhang,
- Jian Yang,
- Chaowei Si,
- Guowei Han,
- Yongmei Zhao and
- Jin Ning
In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and anoth...

