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Journal: Micromachines, 2015
Volume: 6
Number: 1447

Article: Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology
Authors: by Cheng-Yang Lin, Cheng-Chih Hsu and Ching-Liang Dai
Link: https://www.mdpi.com/2072-666X/6/11/1447

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