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Journal: MicromachinesVolume: 17Number: 854
Article: Fabrication of Three-Dimensional Microstructures on SiC Substrates by Using 355 nm Nanosecond Lasers: Process Control and Morphology Evolution
- Authors:
- Hsin-Yi Tsai 1,2,
- Yu-Hsuan Lin 1 and
- Chen-Ju Lee 1
- et al.
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