Peng, J.; Hu, L.; Su, R.; Shen, Y.; Wang, J.; Fu, X.; Ruan, X.
A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment. Micromachines 2026, 17, 287.
https://doi.org/10.3390/mi17030287
AMA Style
Peng J, Hu L, Su R, Shen Y, Wang J, Fu X, Ruan X.
A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment. Micromachines. 2026; 17(3):287.
https://doi.org/10.3390/mi17030287
Chicago/Turabian Style
Peng, Jiefeng, Liang Hu, Rui Su, Yingnan Shen, Jing Wang, Xin Fu, and Xiaodong Ruan.
2026. "A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment" Micromachines 17, no. 3: 287.
https://doi.org/10.3390/mi17030287
APA Style
Peng, J., Hu, L., Su, R., Shen, Y., Wang, J., Fu, X., & Ruan, X.
(2026). A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment. Micromachines, 17(3), 287.
https://doi.org/10.3390/mi17030287
