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Journal: MicromachinesVolume: 16Number: 62
Article: A Comparative Analysis of Laser-Ablated Surface Characteristics Between the Si Face and C Face of Silicon Carbide Substrates
- Authors:
- Hsin-Yi Tsai1,2,
- Yu-Hsuan Lin1 and
- Kuo-Cheng Huang1,*
- et al.
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