- Article
Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms
- Jiaqi Miao,
- Pinghua Li,
- Mingchen Lv,
- Suzhen Nie,
- Yang Liu,
- Ruimei Liang,
- Weijiang Ma and
- Xuye Zhuang
This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety...

