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Journal: MicromachinesVolume: 15Number: 1461
Article: Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing
  • Authors:
  • Carolina Viola1,
  • Davide Pavesi1 and
  • Lichen Weng1
  • et al.
Link: https://www.mdpi.com/2072-666X/15/12/1461

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