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Journal: Micromachines, 2024
Volume: 15
Number: 1461
Article:
Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing
Authors:
by
Carolina Viola, Davide Pavesi, Lichen Weng, Giorgio Gobat, Federico Maspero and Valentina Zega
Link:
https://www.mdpi.com/2072-666X/15/12/1461
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