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Journal: Micromachines, 2024
Volume: 15
Number: 1377
1377
Article: ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection
Authors: by Shutao Yao, Wenling Shang, Guifeng Ta, Jinyan Tao, Haojie Liu, Xiangyong Zhao, Jianhe Liu, Bin Miao and Jiadong Li
Link: https://www.mdpi.com/2072-666X/15/11/1377

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