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Journal: MicromachinesVolume: 15Number: 94
Article: Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures
  • Authors:
  • Aliaksandr Duleba1,
  • Mikhail Pugachev1 and
  • Mark Blumenau1
  • et al.
Link: https://www.mdpi.com/2072-666X/15/1/94

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