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Journal: Micromachines, 2023
Volume: 14
Number: 1598
Article:
High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
Authors:
by
Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang and Zhanying Wang
Link:
https://www.mdpi.com/2072-666X/14/8/1598
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