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Journal: Micromachines, 2023
Volume: 14
Number: 1098
Article:
A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy
Authors:
by
Zhongxuan Hou, Yongkang Zhang, Chaowei Si, Guowei Han, Yongmei Zhao, Xiaorui Lu, Jiahui Liu, Jin Ning and Tongbo Wei
Link:
https://www.mdpi.com/2072-666X/14/6/1098
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