Liu, X.; Zhang, Q.; Chen, M.; Liu, Y.; Zhu, J.; Yang, J.; Wang, F.; Tang, Y.; Zhao, X.
Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method. Micromachines 2023, 14, 1942.
https://doi.org/10.3390/mi14101942
AMA Style
Liu X, Zhang Q, Chen M, Liu Y, Zhu J, Yang J, Wang F, Tang Y, Zhao X.
Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method. Micromachines. 2023; 14(10):1942.
https://doi.org/10.3390/mi14101942
Chicago/Turabian Style
Liu, Xiaonan, Qiaozhen Zhang, Mingzhu Chen, Yaqi Liu, Jianqiu Zhu, Jiye Yang, Feifei Wang, Yanxue Tang, and Xiangyong Zhao.
2023. "Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method" Micromachines 14, no. 10: 1942.
https://doi.org/10.3390/mi14101942
APA Style
Liu, X., Zhang, Q., Chen, M., Liu, Y., Zhu, J., Yang, J., Wang, F., Tang, Y., & Zhao, X.
(2023). Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method. Micromachines, 14(10), 1942.
https://doi.org/10.3390/mi14101942
