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Journal: Micromachines, 2023
Volume: 14
Number: 170
Article:
Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
Authors:
by
Dayao Meng, Kun Huang and Wei Xu
Link:
https://www.mdpi.com/2072-666X/14/1/170
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