Xu, S.; Zhou, N.; Shi, M.; Zhang, C.; Chen, D.; Mao, H.
Overview of the MEMS Pirani Sensors. Micromachines 2022, 13, 945.
https://doi.org/10.3390/mi13060945
AMA Style
Xu S, Zhou N, Shi M, Zhang C, Chen D, Mao H.
Overview of the MEMS Pirani Sensors. Micromachines. 2022; 13(6):945.
https://doi.org/10.3390/mi13060945
Chicago/Turabian Style
Xu, Shaohang, Na Zhou, Meng Shi, Chenchen Zhang, Dapeng Chen, and Haiyang Mao.
2022. "Overview of the MEMS Pirani Sensors" Micromachines 13, no. 6: 945.
https://doi.org/10.3390/mi13060945
APA Style
Xu, S., Zhou, N., Shi, M., Zhang, C., Chen, D., & Mao, H.
(2022). Overview of the MEMS Pirani Sensors. Micromachines, 13(6), 945.
https://doi.org/10.3390/mi13060945